High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

LEC-OM02704CN

[0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03 8 (16)10 (12)([9][0]) [9][0] [0][0] EMGLSPLSN OFF ON/OFF 1EA5 4 [0][3] (DO) 1EA5 4 [1][0] EMGLSPLSN

2/3 Port Valve

1 Support spring Stainless steel (2) Fluid temperature C Ambient temp. C Fluid Air Liquid Non-leak Vacuum (3) (3) Solenoid Specifications Air (Std.) Oil (Std.)

Vacuum

C C t . : . !

Vacuum

C C t . : . !

Series KV2 Fittings

C Tube OD (inch) MA MB Min. Flow Dia. Part Number D1 Wt.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

reduces flow setting time

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

One-touch Fittings Series KQ2

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

SX

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 18 pins Terminal block

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

•

I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

EXxx-OMS0026CN

1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0 AXA 0 Byte1 Hi byte DYB(2) 07 (0) Byte2 AXA 1 Lo byte 07 (0) Byte3 Hi byte 815 SEN3(5) Byte4 DXB(3) 07 1623 Byte5 07 2431 DXD(4) Byte6 815 Byte7 Padding 8 byte 6 byte Diagnostic mode 0 (MSB-LSB) 1 Hi byte DYB(1) 07 Byte0 AXA 0 Byte1 Lo byte DYB(2) 07 (0) Byte2 AXA 1 Hi byte 07

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF , output 3 does not go ON even if "C" is turned ON.