Nozzle Diameter: ø0.7, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: NPTF, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum

Nozzle Diameter: ø0.7, Body Style: Single Unit w/Valve, Supply Pressure: 3.5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø0.7, Body Style: Manifold w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø1.3, Body Style: Manifold w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø0.5, Body Style: Single Unit w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø1.3, Body Style: Single Unit w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

Nozzle Diameter: ø0.7, Body Style: Single Unit w/Valve, Supply Pressure: 5kgf/cm2, Thread: NPTF, Valve Specifications: K [Vacuum Valve+Release Valve], Voltage: 24VDC, Lead Wire 1: L Plug Lead Wire: 0.3m, Manual Override: Non-locking Push Style (Or None in Case of No Valve), Vacuum Switch: 1 Setting 200°Adjustment, Lead Wire 2: -

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

Proposals for Energy Saving

E15 X142 L 88 Switch type Conforms to the standard product.

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

PFxx-OMS0001CN

() 3 -22No.PF-OMS0001CN-A OU1OUT2 {3 ] [3 ] 3 [P_1]ON [H_1]OFF [L/min] ON OFF () PFMC7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMC7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMC7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1

PFxx-OMP0001CN

min] ON OFF [] PFMB7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMB7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMB7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(28)[F 2]OUT2(36) -22No.PF-OMP0001CN-F <> 1 [P_1][n_1][] 500 L/min

PF-OMM0004_C

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

PFxx-OMO0004CN

ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: L (With Lock Nut)

Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: L (With Lock Nut)

), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: L (With Lock Nut)