EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

PF3W3.eng

[F98] Output check OFF Temperature sensor disconnection error Product series is displayed Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. [F99] Reset to the default settings OFF Panel mount adapter (Part number: ZS-26-B) Check whether the temperature can be measured with the remote sensor.

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

ZP

B A B A B Dimensions Dimensions Dimensions Model A 63 63 63 80 80 80 B 65 65 65 83 83 83 C 14.5 14.5 14.5 16.5 16.5 16.5 D 26 26 26 28 28 28 E 66 101 137 68 103 139 F 121.5 Y 3.5 3.5 3.5 4.5 4.5 4.5 Model A 100 100 100 100 125 125 125 125 B 103 103 103 103 128 128 128 128 C 78 114 154 189 78 114 154 189 D 152 188 228 263 152 188 228 263 Model A 40 40 40 50 50 50 B 42 42 42 52 52 52 C 63 98

ZP

B A B A B Dimensions Dimensions Dimensions Model A 63 63 63 80 80 80 B 65 65 65 83 83 83 C 14.5 14.5 14.5 16.5 16.5 16.5 D 26 26 26 28 28 28 E 66 101 137 68 103 139 F 121.5 Y 3.5 3.5 3.5 4.5 4.5 4.5 Model A 100 100 100 100 125 125 125 125 B 103 103 103 103 128 128 128 128 C 78 114 154 189 78 114 154 189 D 152 188 228 263 152 188 228 263 Model A 40 40 40 50 50 50 B 42 42 42 52 52 52 C 63 98

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

100

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Digital Flow Switch For Air/Water Series PF2A/PF2W

Description Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C Panel mounting adapter A, B ZS-22-E Panel mounting adapter With waterproof seal, mounting screw With mounting bracket With waterproof seal, mounting screw PF2A3 PF2W3 Panel Front protective cover Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter B Panel mounting adapter Mounting

Ejector Valve Unit Series ZYY/ZYX 1

-20-A ZS-20-5A55 Note) When ordering a switch with 5 m lead wires, enter the part numbers for both a switch without connector and lead wires with connector.

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

Vacuum Equipment

Pad Bellows Pad For a workpiece that does not have a space for a buffer, or for a workpiece with a diagonal surface. Caution Guide for drop prevention If multiple pads are used for transporting a flat object with a large surface area, properly allocate the pads to maintain balance.

3

Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4 Series PFMC For Flow Switch Precautions, refer to Handling Precautions for SMC Products on SMC website. For Specific Product Precautions, refer to the Operation Manual on SMC website.

ZSE30/ISE30

ZS-27-A Bracket ZS-27-B Panel mount adapter ZS-27-C Panel mount adater + Front protective cover ZS-27-D With M3 x 8L (2 pcs.) 16-2-4 5 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Specifications ZSE30 (Vacuum/Low pressure) 100.0 to 100.0 kPa 101.0 to 101.0 kPa 500 kPa 0.2 kPa ISE30 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 MPa Rated

PF2D

Description PF3W Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw LFE PF2D PF2D Panel Front protective cover PF2D30 IF Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Description Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw Panel Front protective cover PF2D30 Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter B Mounting bracket

PSxx-OME0003CN

-2No.PS-OME0003CN-F / *3) 1 1.5 *3)1 1 -3No.PS-OME0003CN-F () () () () -4No.PS-OME0003CN-F () * JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OME0003CN-F * FG (23N ) () () * () 6 33 ( ) () 10 m DC(-)() () -6No.PS-OME0003CN-F * ( ) () CE 050 * 2030 10 1% * -7No.PS-OME0003CN-F (01MPa) (0-101 kPa) (3 m) (0101 kPa) (1 ) (-101101 kPa) ZS-28-C 1 1 ZS-26-F 3 m + ZS-26-J 3 m 15[

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Note Orifice ZS-48-A Without orifice With orifice Bracket A ZS-50-A Interchangeable with ISE75(H) With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 8 ISE70G/75G/76G/77G Series For pressure switch precautions and specific

PFxx-OMJ0005CN

54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C

ZSE F/ISE

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 Bracket A ZS-24-A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.5 4.2 11.5 40 15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5