Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: None, Calibration Certificate: w/Certificate

Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: B (PNP Open Collector 2 Outputs), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 2 Outputs, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certificate: -

2

B C R V Q C B IN OUT IN OUT 2 x P (Port size) 2 x P (Port size) Clearance for maintenance G AC-A A Clearance for maintenance G AC-B Bracket (Option) AL30-A to AL40-06-A AL50-A AL60-A N T J M U J N T U M S S D R R C B V Q B C V Q IN OUT IN OUT Bracket (Option) 2 x P (Port size) A E Clearance for maintenance G 2 x P (Port size) Clearance for maintenance G A Applicable model AL10-A/AL20-A AL30

CATALOG

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

V100

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SYJ SZ Flow Characteristics VP4 Model Flow characteristics 1 4/2(P A/B) 4/2 5/3(A/B R) Port size C (dm3/(sbar)) b Cv C (dm3/(sbar)) b Cv 1,5/3 (P,R) 4,2 (A,B) S0700 0.55 0.57 0.68 1.8 1.5 1.8 3.7 3.2 3.7 M5 C4 C6 1/8 C6 C8 1/4 C8 C10 0.29 0.24 0.28 0.24 0.30 0.20 0.25 0.26 0.28 0.14 0.14 0.17 0.44 0.37 0.45 0.96 0.81 0.98 0.72 0.71 0.77 2.1 2.0 2.2 3.8 4.0 4.1 0.24 0.20 0.24 0.17 0.16

4/5 Port Solenoid Valve

M5 x 0.8 P, R port A, B port M3 x 0.5 M5 x 0.8, C4 (One-touch fitting for 4) Flow Characteristics Flow characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Manifold Body ported for internal pilot Type SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 Type SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 Type

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

5-Port Solenoid Valve

C10 C8 2.8 0.25 3.5 0.15 76.8 n + 445 SS5Y7 SY7101 SY7201 C12 C12 4.6 0.16 4.7 0.18 117.9 n + 532 Valve Seal Type: Metal Seal Top Ported (Type 12) Port size Flow rate characteristics Weight: W [g]*2 Manifold Valve (n: stations) 1, 3/5 (P , E) 4, 2 (A, B) 1 R 4/2 (P1 R A/B) 4/21 R 3/5 (A/B1 R E) model model C [dm3/(sbar)] b C [dm3/(sbar)] b SS5Y3 SY3131 SY3231 C8 C6 1.2 0.16 1.3 0.18 25.1

ZP

Form w 1 Material e Vacuum inlet r Connection 44.5 thread Applicable tubing O.D. C N S U F GN GS B4 M4 x 0.7 4 ZP R 10 13 16 UT 28.4 04 06 M5 x 0.8 19.5 B5 M5 x 0.8 5 Dimensions Per Vacuum Inlet 2.52 Width across flats 7 Model C D E Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

NCQ2/CQ2

x 160L 6.5 7.5 10 -100DC-R -100DC-R C BQ2B50-10DC-R C BQ2B25-10DC-R 80 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 8.5 12.5 7 -100DC-R -100DC-R C BQ2B63-10DC-R C BQ2B32-10DC-R 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 9 14.5 -100DC-R -100DC-R C BQ2B80-25DC-R 15 -50DC-R C BQ2B100-25DC-R 15.5 -50DC-R

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20 25 22 27 23.5 24 33.5 34 51.5 52 12.4 15.6 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.