Table of Contents Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common
(Example) For M3: L1 = 6mm Applicable shaft types: X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z J Z X Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37 Symbol
Cushion Air cushion V Mounting bracket*1 Nil Rubber bumper (Standard) C Air cushion Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Rod boot E V V V V V F V V V V Y V V V V Rubber bumper Nil Without rod boot J Nylon tarpaulin (One end) K Heat resistant tarpaulin (One end) Air cushion E V V
switch Solid state switch PLC B54 Relay, PLC 100 V, 200 V 100 V 200 V Yes Yes CC 12 V A33 A34 A44 B59W PLC Terminal conduit 24 V 2-wire RB DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) G59 J 5 V 12 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 3-wire (NPN) 24 V IC circuit G5P 3-wire (PNP) Grommet K59 100 V, 200 V D2-wire G39 K39 G59W IC circuit 3-wire
switch Solid state switch PLC B54 Relay, PLC 100 V, 200 V 100 V 200 V Yes Yes CC 12 V A33 A34 A44 B59W PLC Terminal conduit 24 V 2-wire RB DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) G59 J 5 V 12 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 3-wire (NPN) 24 V IC circuit G5P 3-wire (PNP) Grommet K59 100 V, 200 V D2-wire G39 K39 G59W IC circuit 3-wire
V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of
Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24
Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N F M A E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043
V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8
01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory
Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped
state auto switch Reed auto switch Terminal conduit 24 V Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color) 12 V Grommet Water resistant (2-color indicator) 5 V, 12 V 12 V 3-wire (NPN equivalent) IC circuit A96 5 V Yes Grommet A93 A90 A33 A34 A44 100 V 100 V or less Relay, PLC No 2-wire IC circuit PLC 12 V 24 V Terminal conduit Yes Relay, PLC 100 V, 200 V Din terminal
V IC circuit 12 V 5 V, 12 V 5 V IC circuit IC circuit IC circuit MQ With diagnostic output (2-color indication) A96V A93V A90V 100 V 100 V or less 100 V, 200 V 200 V or less 24 V or less 3-wire (NPN equivalent) Yes RHC No Yes No Yes No Grommet 12 V Relay, PLC RZQ Connector 24 V 2-wire IC circuit PLC 12 V Terminal conduit Yes 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic
V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication
) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.
Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.
24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 3-wire (NPN) 2-wire Relay, PLC ML2B 5 V, 12 V IC circuit 3-wire (PNP) C J G5-S 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V CV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example)
24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 3-wire (NPN) 2-wire Relay, PLC ML2B 5 V, 12 V IC circuit 3-wire (PNP) C J G5-S 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V CV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example)
01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory
Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.