ZSE20B(F) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ZSE20B(F) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

1

r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 3-position

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

SMC Electronic Switch Series Variations

Reversed output mode Refer to the "Hysteresis mode" and "Window comparator mode" in Technical Information on p.3.14-8. U Ripple A small AC voltage superimposed on top of a DC voltage. In case of Fig.4, ripple 10% means V' V" V'/V X 100 = 10% When no pulsation is happened, ripple is 0%. Unit conversion Refer to the Technical Information on p.3.14-13.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

PSxx-OMM0006CN

10 (p-p)10() 45 mA NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 1F.S. 2 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 3 12 V 300 24 V 600 50 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65 -550 -1060 () 3585RH() AC1000 V 1 50 M (DC500 V ) 2F.S. (25 ) 5 3.52 m 0.15

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

IR30-OM00013

SU P.

PSE540/560

N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

PSxx-OMU0002CN

kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p)10 35 mA 2F.S. 1digit(253 ) 0.2F.S.1 digit 2.5F.S.(253 ) 1F.S. 2%F.S.(25) NPN PNP 2 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5 ms (20,100,500,1000,2000,5000 ms ) 0 2 15 V 0.65 V 1 k 420 mA 2.420 mA 12 V 300 24 V 600 50 0.4 V 5 ms -75No.PS-OMU0002CN-D

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

IR20-OM00008

M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.

ZSE30A(F)/ISE30A

Current output Load impedance Maximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green) 2% F.S. 1 digit (Ambient temperature of 25 3C) Lights up when switch output is turned ON.

PSxx-OML0002CN

10(P-P)10() 40 mA NPN PNP 1 NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms (2010050010002000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 2 1F.S. 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 12 V 300 24 V 600 50 3 4 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1 OUT2 IP40 050 -1060 () 3585RH AC1000 V 1 50 M (DC500 V ) 2F.S.(25 ) 3 3.52 m 4 0.15 mm 2(

This is a legacy product, and replaced byZSE20B-V-P-N01-W-X500, SWITCH, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JD, ZSE40/50/60 1/8 PORTED, .17416 lb, ModelRated pressure rangeDisplay/Set pressure rangeWithstand pressureDisplay/Minimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--Repeat accuracyHysteresisAnalog outputAuto-shift inputDisplayDisplay