Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

ZSE20C(F) is UL/CSA, CE and RoHS compliant.

2

For Fittings & Tubing Precautions, refer to Handling Precautions for SMC Products and the Operation Manual on SMC website, http://www.smcworld.com Compatible with Food Sanitation Law Tubing model Model O.D. x I.D. (mm) TU0425 4 x 2.5 TU0604 6 x 4 TU0805 8 x 5 TU1065 10 x 6.5 TU1208 12 x 8 20 m roll Color Caution Symbol Color B Black W White BU Blue C Clear 1.

Table of Contents

L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

15

M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 41.4 89.8 66.9 M4 x 12 M5 x 25 10 40 * Dimensions after mounting a ring spacer 803 LEFS Series Dimensions: Motor Flange Option Motor mounting position: Motor parallel e w q r PD (I.D.)

Battery-less

torque > Ts Effective torque > Tf x 1.5 Effective torque > Ta x 1.5 10 Effective torque: T [Nm] LER 50EK High torque 8 w Check the effective torque Confirm whether it is possible to control the speed based on the effective torque corresponding with the angular speed while referencing the (Effective TorqueAngular Speed graph). 6 Selection example 4 Inertial load: Ta Ta x 1.5 = I x x

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) C D EH EV F G H J K L M O1 R S 25 15 to 100 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 105 to 400 32 20 to 100 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 63 Up to 200 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 205 to 500 505 to 800 Size Stroke range (mm) T U B V Without lock With lock A W Z A W Z 25 15 to 100 46.5

1

n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.

Environment

How to Order 25A-LEFS 32 H R S3 B 200 S 2 A2 Series compatible with secondary batteries q w e r t u !1 y i o !

Secondary battery capability is achieved by providing removing the bracket munting inserts found on the standard ZSE20C.  25a-ZSE20C(F) is UL/CSA, CE and RoHS compliant, with an IP65 rating.

Secondary battery capability is achieved by providing removing the bracket munting inserts found on the standard ZSE20C.  25a-ZSE20C(F) is UL/CSA, CE and RoHS compliant, with an IP65 rating.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS