CL

140 160 BY C EA K D BX J KA BP EB FA F GA GC GB B AL B1 H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 to 1000 to 1000 to 1200 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 22 27 27 32 41 8 11 11 13 16 16 20 20 25 30 36 36 40 59 67 73 77 85 112.5 121

V100

L2 4 8.5 (Station n) (Station 1) (Station 1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121

Smooth Cylinder/Low Speed Cylinder

100 146 73 121 53.5 22 13 4 x LD X X Y LZ LX Y Bore size (mm) Stroke range (mm) LT LH Y LZ X LX LY LS + Stroke 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 3.2 46 91.5 18.2 9 77 60 Rod end male thread 80 4.5 114 59 22.5 11 98 77 100 6 24 12.5 136 71 117 94 Compact foot bracket material: Carbon steel Surface treatment: Zinc chromated L1 Rod side flange style: CQ2YF/CDQ2YF Rod Side

CL

116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

SMC

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

0.01

ISE70 ZSE80 ISE80 Terminal block box ZSE ISE ZSP PS ISA2 ISA2 With regulator + 2 port solenoid valve PSE With 2 port solenoid valve IS ISG ZSM1 Check optimum position at a glance.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Solid State Switch: ZSM1-015 Reed Switch: ZSM1-021 Brown Light emitting diode Reed switch Brown Main circuit of switch Black Polarity protection diode Black Blue Red lead wire: Connect the + power supply to operate the main switch circuit (to the + terminal of the power source). White lead wire: Connect the load (to the input or output relay of the PLC).

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 117 118 118 119 119 120 120 121 121 122 122 123 125 126 127 127 128 128 129 130 131 131 132 133 135 135 136 137 138 138 139 140 141 141 142 143 144 145 147 150 150 151 Construction. Dimensions .

CA2

68 61.5 121 112 102.5 57.5 112.5 61 57.5 104 6-8-15 16 Series CA2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Auto switch model D-P5DWL Hs Bore size (mm) A B A B A 40 3 3.5 1 1.5 Ht 50 3.5

A

47 M6x1 depth 12 50 285 1200 32 35 32 20 30 2 14 58 M8x1.25 depth 16 63 284 1200 32 35 38 20 32 2 14 72 M10x1.5 depth 16 80 284 1400 37 40 50 25 40 3 20 89 M10x1.5 depth 22 100 284 1500 37 40 60 30 50 3 20 110 M12x1.75 depth 22 Bore K KA MM NA P S TA **TC H ZZ (mm) 20 4 6 M8x1.25 24 18 77 11 M5x0.8 35 114 25 5 8 M10x1.25 29 18 77 11 M6x0.75 40 119 32 5.5 10 M10x1.25 36 18 79 11 M8x1.0 40 121

CXS

0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99 144 198 CXSJM10 159 136 121

ZSE30A(F)/ISE30A

ZSE10 ISE10 Reducing setting labor Minimizing risk of mistakes in setting ISE70 Copy Copy ZSE80 ISE80 PS ISA3 ISA2 ISE35 Master sensor 1 unit Slave side 2 units 10 units PSE 3-step setting 3-step setting IS ISG 1 2 3 ZSM1 Push Push Push Push Completion of setting Adjust to the set-value by the or button. Added vacuum range.

Air Cylinder

(mm) Axial foot Head flange LS ZZ Z Head end lock Rod end lock Double end lock Head end lock Rod end lock Double end lock Head end lock Rod end lock Double end lock 20 112 113 123 141 142 152 117 118 128 25 112 113 123 145 146 156 121 122 132 32 112 115 123 145 148 156 121 124 132 40 139 142 147 176 179 184 148 151 156 Bore size (mm) (mm) Clevis Head trunnion Z ZZ Z ZZ Head end lock Rod end

ZP

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 +7 +228 3 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Regarding the long stroke which exceeds the stroke range, refer to page 7-6-121 for the long stroke type of either CQ2 or CQS. Note 4) When ordering foot bracket, order 2 pieces per cylinder. Note 5) Parts belonging to each bracket are as follows.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

70.0 10.0 IN -XC22 Fluoro rubber seals 353 212 177 141 106 70.6 247 35.3 OUT CXS15 8 -X593 Without plate 252 151 126 101 75.6 50.4 176 25.2 IN 628 377 314 251 188 126 440 62.8 OUT CXS20 10 471 283 236 188 141 94.2 330 47.1 IN 982 589 491 393 295 196 687 98.2 OUT CXS25 12 756 454 378 302 227 151 529 75.6 IN 1608 965 804 643 482 322 1126 161 OUT CXS32 16 1206 724 603 482 362 241 844 121

Compact 5-Port Solenoid Valve

1 DIN rail mounting spacer ZK2-EU3-A ZZK2 A S0 Manifold end plate assembly Refer to page 121 for the manifold part number. 126 JSY3000 Series Manifold Parts Nos.