SV

010 050 1000 mm 5000 mm l Terminal no.

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

SJ3A6

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

45

AXT100-DS25015 030 050 L Terminal no.

45

AXT100-DS25015 030 050 L Terminal no.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Table of Contents

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

SY

number L 44 16 8 Terminal no.

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

E-ITV-STD-RF-A

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 584 a Programless Controller (With Stroke Study) LECP2 Series Dimensions Screw mounting (LECm2mm-m) 38 36.2 18.1 85 4.5 for body mounting 1.2 4.5 110 101 86 4.5 for body mounting DIN rail mounting (LECm2mmD-m) CN4 I/O connector 38 36.2 85 (11.5) SL CN3 encoder connector CN2

•

L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

Air Pilot Operated Series NVSA

: : ' t : : : : , t t l l i , , 1 : : . ' . , 1 : : ' , , . _ , , ; , : . : , : ; : , , , : : . , , 1 : : . i r . r : i i i ; . , , , : : ; , , . : : : : : : : : : : : : : 1 1 1 : 1 1 l : : : : : : : : : : : : . ' r r , : ' _ i l , ; r , ' , ' . , r , ' ' ' , 1 , , 1 l l r r , | t , r , , , l l ' , r , . : : " : : , . !

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Air Pilot Operated

144 NXT 0t&Sl P20 AXT 22S4A NXT 0t0.t7-, /.=.>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

13

Selection Graph (4) (Adsorption Response Time) Pad Pad Valve effective area = Q/11.1 (mm2) Ventilation work Surface of work is rough Piping capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Leakage from Effective Area of Work Leakage QL = 11.1 x SL QL: Leakage l/min (ANR) SL: Effective area between work and pad, and work opening area (mm 2) Leakage from Adsorption Test As described

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.