5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

Direct Solenoid

Direct Solenoid Series NVS 3105, 4014/ 402/3/ 4/ 54 ,.,4:,.t .,r".,,,. 't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.'

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Profi-E

M ast er Pow er SU P. ( D C24V) PRO FI BU SD P Sl ave1 O t her D P equi pm ent Sl ave2 O t her D P equi pm ent The pressure proportional to the signal on the second side is obtained.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE:

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Air Pilot Operated Series NVSA

Jr., l,t, 3 . j ':;',14 . , : ; , , I r , ' ' . , I I I I r . . , , r , , , , . . , , . . r l r l , r r t r t r r _ : , r r r t , r ' : , ' , , , r , , , . , , . ' 1 1 1 i , , 1 : : : ; , , , , 1 ' . 1 i , , , " " ' . , : : ; : : l i , : , : : . l i : : ; , , , , : : , : , , ; , , , " . : : : ; ; : : , : . : . 1 ; i : : : : : : : : : ; ; " ' . 1 , , r 1 1 i , r r " : : " ' l i , ' r . : 1

NCA1

6-AB (Hole) LD + Stroke SL + Stroke R TA AO D C B AL AH AE AB AA A KK Bore size (in) MM DD WF S K G EE EA E ZM SL LD P Y 150 (1.5") 5/8 1.43 1/8 7/16 9/16 3/8 1 1/8 1 1 3/16 2 3/16 3/8 2.02 3/4 7/16-20 1/4-28 1 1 1/4 0.28 1.26 3/8 0.3 2 5.78 5.78 3.78 2.36 1.71 200 (2") 5/8 1.84 1/8 9/16 9/16 3/8 1 1/8 1 1 7/16 2 11/16 3/8 2.6 3/4 7/16-20 5/16-24 1 1 3/4 0.34 1.26 3/8 0.3 2.5 5.82 5.82 3.82

NCA1

6-AB (Hole) LD + Stroke SL + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R Bore size (in) MM KK A AA AB AO AE TA AH AL B C D DD E EA EE G K S WF Y P LD SL ZM 150 (1.5") 5/8 1.43 7/16-20 3/4 2.02 3/8 7/16 2 3/16 1/8 1 3/16 1 1 1/8 3/8 9/16 1/4-28 2 0.3 3

Compact

sl,,43AZP r A MSD3A3PlE F r\4st,i3AzP1B N4SD3A3P1E r : lOOVAC HC-PQ033 NIR-C1OA] Applicable HC.PQO33B MR-C10A1 Applicable Applcalrle 200vAc HC PO033 I\,IFI'ClOA HC.PQOJ3B tvR-c10A 100vAc SGI\4E.A38F12 SGDE-A3BP SG[,1E.A3BF]28 SGDE A3BP Applicable ] Yasukawa Eleclnc 2OOVAC SGME A3AF12 SGDE.A3AP Applicable Applicable 1 A l SGI\,IE.A3AF12B SGDE'A34P Note1)Acseromolorisbasca||yavai|ableincombnal

LX Series Compact Electric Actuators

sl,,43AZP r A MSD3A3PlE F r\4st,i3AzP1B N4SD3A3P1E r : lOOVAC HC-PQ033 NIR-C1OA] Applicable HC.PQO33B MR-C10A1 Applicable Applcalrle 200vAc HC PO033 I\,IFI'ClOA HC.PQOJ3B tvR-c10A 100vAc SGI\4E.A38F12 SGDE-A3BP SG[,1E.A3BF]28 SGDE A3BP Applicable ] Yasukawa Eleclnc 2OOVAC SGME A3AF12 SGDE.A3AP Applicable Applicable 1 A l SGI\,IE.A3AF12B SGDE'A34P Note1)Acseromolorisbasca||yavai|ableincombnal

•

NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

Air Pilot Operated

I I +.--' +-\ ae " "f -a1-a -; l-nr l : r #4E'ii rffi:-i,=' .

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.