Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

For Water Digital Flow Switch Series PFW

Panel adapter B ZS-22-02 NPN open collector 2 outputs PNP open collector 2 outputs 0 1 Specifications Model PFW300 PFW301 PFW310 PFW311 PFW321 PFW320 Flow rate measurement and setting range Minimum setting unit 0.5 to 4 (setting is 0.6 to 4) l/min 2 to 16l/min 5 to 40l/min 0.1l/min 0.5l/min 0.05l/min Real-time flow rate l/min, gal (US)/min Accumulated flow Display units Note 1) l, gal (US

VF1000-OMP0001

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

VHS20/30/40/50

I 10 I G H F E X H .

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Coil rated voltage 12, 24 VDC, 100, 110 to 120, 200, 220, 240 VAC (50/60 Hz) (3) (A) 2 INT Allowable voltage fluctuation 15 to +10% of rated voltage Coil insulation type Class B or equivalent Apparent power AC (Power consumption) Inrush 5.0 VA/60 Hz, 5.6 VA/50 Hz Electrical specifications Holding 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz Power consumption DC 1.8 W Electrical entry Grommet

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

VKF300

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 11 Series VKF300 Specific Product Precautions Be sure to read before handling. Refer to pages 8 through 11 for safety instructions and precautions. Light/Surge Voltage Suppressor Use of the DIN Connector Manual Override Operation Warning Caution Caution Connection procedure 1.

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa, Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 1/4, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Right to Left, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa, Made to Order: 0.4 MPa Setting

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa, Made to Order: X406 (0.4 MPa Setting)

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .92076 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .88184 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.19514 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .86039 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.10000 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

Pneumatic Positioner IP300/IP3100

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

VEX-OMV0001

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4