CE

, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

"n" pcs. 90 Same side 120 75 (n 4) 2 (n 4) 2 (n 2) 2 120 + 50 15 + 50 90 + 50 Different sides n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 6, 8 D-B5, D-B6 (n 2) 2 (n 2) 2 90 + 50 120 + 50 75 + 50 (n 2) Same side n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 90 1 pc. 120 10 120 Different sides 20 90 2 pcs. "n" pcs.

3 Position Cylinder Series RZQ

Graph 1 Graph 2 120 60 B C 110 P1 100 50 63 63 Circuit C 90 Power valve: Precision regulator, etc. 80 40 70 Load mass (kg) Load mass (kg) or REA Regulator 60 30 50 50 REB 50 REC 40 20 A 40 40 Power valve: Regulator valve CY 30 CX 32 32 20 10 MQ B 10 RHC C 0 0 P1 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) RZQ When adjusting the air pressure in

CE2

40 398 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke Y ZZ LD LS LX X B LH Bore size (mm) 40 50 63 80 100 9 27 13 309.5 58.5 40 272.5 42 333.5 9 45 289.5 50 27 13 68.5 59 34 16 362 11.5 83 50 322 16 415 13.5 372 76 44 100 65 43 17 432 13.5 114 75 386 92 10-12-50 Stroke Reading Cylinder with Brake CE2 Rod side flange style RE A B REC Head side flange style CX CY MQQ M RHC Single clevis style

Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction MHR2 q !

VDW

(C) 10 to 50 Fluid temperature (C) 1 to 50 (No freezing) Environment Location without corrosive or explosive gases Valve leakage (cm3/min) 0 (with water pressure) 1 or less (Air) Mounting orientation Unrestricted Vibration/Impact (m/s2) Note 4) 30/150 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Rated voltage 10% of rated voltage Allowable voltage fluctuation

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

LG1H

4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

Compact

0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1 0.10 ST 15, 20 ST 15, 20 0.15 0.10 ST 5, 10 0.05 0.05 ST 5, 10 ST 5, 10 0.05

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

Power Clamp Cylinder

VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31 23 33 54 Arm position 0 16-0.1 C R L Center Right Left Center

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

Compact Slide Series MXH

0.1 10 6 0.01 20 40 60 80 100 0 Overhang L (mm) 18 Compact Slide Series MXH Selection Graph (4) to (12) (Horizontal Mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph (4) Load Eccentricity 50 mm Graph (7) Load Eccentricity 50 mm Graph (10) Load Eccentricity 50 mm 10 1 10 MXH MXU Mass m (kg) 1 0.1 Mass m (kg) Mass m (kg) 20 16 10 6