Aluminum High Vacuum Angle Valve -10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T
Rc 1/8 12 16-2-23 10 Series ZSE40/ISE40 Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 600 (3000) Lead wire length 3.5 ForM5
P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.
P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.
P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.
4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5 wire oil resistant heavy duty cord (0.15mm) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead wires) Port size Lead wires Weight Note: When equipped with auto shift function, the following ranges can be set.
Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5
ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Base Mounted, Stations: 5 Stations, A Port Size: ø4 One-touch Fitting, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Base Mounted, Stations: 2 Stations, A Port Size: ø4 One-touch Fitting, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Base Mounted, Stations: 4 Stations, A Port Size: ø4 One-touch Fitting, P R Port Thread: -
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 18 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 2 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 4 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 5 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 6 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 8 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 12 Stations, A Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 42 (Base Mounted), Stations: 13 Stations, A Port Size: C4 (ø4 One-touch Fitting)