V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Vacuum Pad

x 0.8, M12 x 1.75 G1/8, G1/4, G3/8 With Adapter 3 Female thread M5 x 0.8 M8 x 1.25 With Buffer Female thread Vacuum inlet: M5 x 0.8, Rc1/8 Mounting: M10 x 1, M14 x 1 10 mm/20 mm 6 I N D E X Vacuum Pad 20, 25, 35, 50 M Pad Unit How to Order p. 2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter How to Order p. 3 Dimensions p. 3 M Vertical Vacuum Inlet, With Buffer How to Order p. 6

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

200mm/s 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Male threads Rod end threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type

VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5

CQM

J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less 13 or less VQ1200 Double M5 (M5 threads) 5.4 (0.3) Rubber seal 15 or less 20 or less VQ1201 C10 (for 10) C4 (for 4) C6 (for 6) C8 (for 8) 1051 (single) 1144 (double, 3P) 3.6 (0.2) Metal seal VQ1300 20 or less 26 or less VQ1000 Closed center VQ2000 VQ200 2 to 16 stations Options: Built-in silencer Direct exhaust VV5Q21Side 5.4 (0.3) Rubber seal VQ1301 25 or less 33 or less VQ201 78

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30