Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 250mm, Motor Option: w/Lock, Vacuum Port: Left, Positioning Pin Hole: Body Bottom, 2 Locations, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: -, I/O Cable Length: -, Protocol: -,

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 250mm, Motor Option: w/Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix:

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix

Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 450mm, Motor Option: w/Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: -, I/O Cable Length: -, Protocol

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

4/5 Port Air Operated Valve Series SYJA3000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Coolant Valve

6.1 9.3 7.9 13.2 14.3 20.0 14.3 20.0 22.5 29.3 25.7 34.3 35.4 53.6 35.7 57.1 42.4 60.6 63.1 86.5 7 0.3 0.2 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

Miniature Regulator

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7

ncq8mp

NCQ8B150-S-PS NCQ8B150-S-PS 150 (1 1/2") NCQ8B200-S-PS NCQ8B200-S-PS 200 (2") NCQ8B250-S-PS NCQ8B250-S-PS 250 (2 1/2") Construction Single Acting Spring Extend 11 12 10 Seal Kit Parts List No.

Digital Flow Switch Series PFA For Air Series PFW For Water

Series PFW Series PFA Series PFA New New 12000l/min 6000l/min 3000l/min 40l/min Flow rate Flow rate 500l/min 200l/min 100l/min 16l/min 4l/min 50l/min 10l/min Size (port size) Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11

PSxx-OMT0001CN

9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

reduces flow setting time

08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

1

Refer to pages 11 to 13 for cylinders with auto switches.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

CEx-OMQ0010

3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100