3 Port Air Operated Valve

12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

High Power Cylinder:

NB 30 36.9 43.9 47.3 WH LX 40 40 45 55 Y 9 9 9 11 NA 26 32 38 41 S 192 193 195 201.5 LS 232 233 241 LT 5.5 5.5 6 6 Rc(PT)P 1/4 1/4 3/8 3/8 X 20 20 23 25 N 22 27 27 30 5.8 to 8.8 251.5 6.8 to 11.3 4.10-8 High Power Cylinder Series RHC 20, 25, 32, 40 How to Order RHC B 20 High power cylinder High power cylinder Cylinder stroke Number of auto switches *Refer to the stroke table on p.4.10-5.

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA

Electromagnetic Digital Flow Switch

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

Peltier-type Chiller Thermo-con/ Compact Type

) 148 40 185 163 Air Air Dustproof filter Model no. label NRTL label 90 20 20 110 Rubber legs (4 pcs.)

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

5 Port Air Operated Valve

20 stations P, R Port size 1/8 1/4 3/8 1/2 VFA1000 VFA3000 VFA5000 Symbol Up to 10 stations for VV5FA5-20, and up to 15 stations for VV5FA5-21. 30 20 21 The A and B ports are made on the top.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

25 40 M 9 12 16 LW 120 176 229 G 8.5 10.7 15.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 B 9.5 14 17.5 (LL) 40 49.6 75 A 80 105 165 LE 5 6 8 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 Rc 1/8 Rc 1/4 PE 1 3.4 0.5 SS 9.7 14 21.5 TT 12.5 19.3 35.4 PF 10 12 20 RW 69 100 116 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 QW 66 98 110 R 5 8 12 RR 5.3 8.5 11 PD 23 29.2 36 QQ 16.4 20.4 25.5 NV

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

Digital Flow Switches Series PF2A

mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.

10

For with cap Applicable absorber B C h1 h2 MM d f h M6 x 0.75 MM B 2 C 8 For basic type RBC08S RBC10S RBC14S RBC20S RBC27S RJ06J RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S RJ08 12 13.9 6.5 23 M8 x 1.0 9 15 9.2 RJ10 M8 x 1.0 14 16.2 8 23 M10 x 1.0 11 15 4 12 13.9 RJ14 M10 x 1.0 19 21.9 11 31 M14 x 1.5 15 20 4 14 16.2 M14 x 1.5 RJ2015 27 31.2 16 40 M20 x 1.5 23 25 6 19 21.9

Compressed Air Preparation Filter

160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 8 International Standard ISO 8573-1:2010 Compressed Air Purity Classes Compressed air is used in a variety of manufacturing processes.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5