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NW5Z5-40-OO2 .NW525,41-OO1 . NW5Z5-42-OOr Aootibla ba! . rlwszt2cool . NW5?$A-OOr . t\"wsztreoo2 .

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

VK300

(S) 42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

VKF300

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Auto Switch Mounting bracket Fixing bolt (not required to be removed) [Housing A] Maximum tightening torque [Nm] 0.9 Lead wire entry [Entry on the Housing A side] Auto Switch Mounting bracket Part No.LEF-D-2-1 [Motor] Tightening torque [Nm] 0.1 to 0.15 Lead wire entry [Entry on the motor side] 40 - 7.5 Precaution on maintenance Warning 1.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

LMU100/200 Series Mist Spray Unit

4Pilot valve 215 23.1 215 13 13 AL800 AL900 ALF ALT AIR AIR BLOW OIL OIL ALD AIR 158 13 13 158 ALB SUP SUP LMU LMU Lubrication plug Lubrication plug SMC SMC ALIP !5Regulator for tank pressure setting !5Regulator for tank pressure setting AEP HEP !6ON/OFF valve for oil mist !7!8ON/OFF valve for air blow !6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

IDX-OM-W093

V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90 Series 1-3 IDX-OM-W093 1.2.5 HFC 1-5 HFC 1 2 3 4GWP R134a R407C R410A R404A GWP 1430 1770 2090 3920 4033722 IDF60/70/80/90 Series

EX500-GPR1A.eng

Connect each connector of Input unit, input blocks, and end block ( portion indicated by arrow in the figure to the right ). 35 Stations 1 2 3 4 5 6 7 8 44.2 110.5 123 148 173 185.5 210.5 223 248 100 112.5 137.5 162.5 175 200 212.5 237.5 12 12 12.5 12.5 13 13 13.5 13.5 82 102 122 142 162 182 202 222 L2 ( Rail mounting pitch: 12.5 ) L1 L3 (L4) (7.5) 5 60 DIN Rail 32.2 46.9 28 29 Applicable

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

Series SY100 3 Port Solenoid Valve Rubber Seal

Solenoid Specifications 3 (R) 1 (P) 1 (R) 3 (P) Order Made P.2.1-15 13 24 SY1 A 13 24 SY1 Series Grommet (G), (H), L plug connector (L), M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60Hz 100, 110, 200, 220 Allowable voltage 10 to +10% Power consumption (W) (1) DC 0.75W (With light: 0.8W) 0.5W (With light: 0.55W) 0.9 (With light: 1.0) 100V 110V [115V

CQM

Data 7-5-13

MHT2

40 50 63 Refer to page 12-13-1 for further information on other auto switches.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

CU

11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions and Heights for Stroke End Detection D-A9 D-F9 D-F9W A 22 (24.5) 2.8 0.5 B W The dimension in ( ) is for D-A93 type.

MHT2

40 50 63 Refer to page 12-13-1 for further information on other auto switches.

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

Compact Guide Cylinder

distance L [mm] Eccentric distance L [mm] 13 Model Selection MGPK Series L L Plate Material Aluminum Alloy /MGPKM Horizontal Mounting m m MGPKAM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 10 10 50 32, 40 32, 40 32, 40 Load mass m [kg] Load mass m [kg] 32, 40 25 25 20 20 25 20 16 25 16 20 12 12 1 1 16 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30