Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 700, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: G, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: G, Auto Switches

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 50mm, Port Thread: TF (G), Stroke: 200mm, Rod Boot: None, Cushion: N (Rubber Bumper)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Response time (ms) (0.5 MPa) Type of actuation 52-SY5000 26 or less 22 or less 38 or less 52-SY7000 38 or less 30 or less 56 or less 52-SY9000 50 or less 50 or less 70 or less 2-position single 2-position double 3-position Note 1) According to dynamic performance test JIS B8375-1981. Note 2) Response time when barriers were combined with a valve.

EX600-DX_DY_DM_eng

Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED shows

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

Nozzle Type Ionizer

Input Discharge stop signal 50 ms or more 50 ms or more The error signal can be reset by turning the reset signal on and then off. ON OFF Input Reset signal Discharge signal (on when ions are being generated) ON OFF Output ON OFF When an error occurs, the signal is turned off. Output Error signal Error occurred Ions are still generated even when the maintenance signal is turned on.

Series 12-REA Sine rodless cylinder

to 22 for details.)

90

50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2 25 4

0.5

Do not apply an external force of 50 N or more to the finger guard. Caution 1. Clean specification is not available with this product. When using in a clean room environment, confirm the required cleanliness before use. Fine particles are generated due to wear of emitters and motor sliding during operation. Mounting Warning 1. Reserve enough space for maintenance and wiring.

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

IR1000/2000/3000

depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43 Approx. 60 50 50 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port M6 x P0.5 15.5 9 82 60 IR3120-0 Mounting hole 48 2.3 76 Approx. 148 22 Bracket (optional) Bleed 43 Pressure gauge (optional) EXH(3) OUT SUP(1) OUT(2) Rc(PT) 1/2 Exhaust port 15.5 M5 depth 7 Approx. 68 66 9 66 22 76 Approx

PA300/500/700

60 50 VR 9 90.9 VH VHS (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 (Bottom existing hole) M5 x 0.8 through hole 1(P) 3(R) 77.2 A B Body ported: VPA542V26.1 31 3.5 NO NC 2(A) 32 26 Switch mark 24.2 41.5 (Mounting hole) 24.2 Bracket (Mounting groove for M5 thread) 2-R 2.7 (PA port) Rc 1/8 PA 45.9 40.5 45 45 28 4.5 1.6 41.6 22 60 50 9 90.9 (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (

PSxx-OMV0008CN

No.PS-OMV0008CN-E / / ISE70G--L2 ISE75G--L2 ISE76G--L2 ISE77G--L2 ISE78G--L2 2 9 10 12 15 15 17 19 21 22 3 23 25 27 27 28 F0 30 F1 OUT1 32 F2 OUT2 35 F3 37 F4 38 F6 40 F10 41 F11 47 F14 Zero-cut 48 F80 49 F81 50 F90 52 F96 54 F98 55 F99 57 58 IO-Link 63 IO-Link 63 63 64 IO-Link 67 76 76 77 86 88 -1No.PS-OMV0008CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50

HRX-OM-T004

PV SV 22. Select response delay time (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.3-12 List of set values Set values Explanation Initial value (Default setting) Setting/checking are not available unless the serial protocol setting is simple communication protocol.

CRQ2

Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.