Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Lead Wire: C (Conduit)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 2 (Energized Closed/N.O.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: F (G), Voltage: 4 (220VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 2 (Energized Closed/N.O.), Option: H (Stainless Steel Body & Shading Coil, FPM Seal, Class B Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 2 (Energized Closed/N.O.), Option: D (BC6, Copper Body & Shading Coil, FPM Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: S (Surge Suppressor)

Fitting Type: T (Union Tee), Size Combination-A Side: 6A (Applicable Tubing Size 1" x 7/8", Flange 25A), Different Diameter-B Side: 6B (Applicable Tubing Size 3/4" x 5/8", Flange 25A)

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

MLGP

Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32

MLGP

Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32

Rotary Table/Rack & Pinion Style Series MSQ

cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m m u u im im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

21

Pivoting Bracket Pivoting Bracket Pin Pivoting brackets consist of a set of two brackets. 7.5 40 7.5 40 3.4 3.4 6.8 6.8 R3.4 R3.4 6.8 6.8 25 25 0.2 17 0.2 17 Dd9 R3.4 R3.4 d R11 R11 +0.15 +0.05 CD +0.15 +0.05 CD m m l t t L 5.2 40 5.2 40 3.2 3.2 57 28 57 28 (mm) (mm) d Part no. Applicable bore size Included retaining ring Dd9 L m t l CD Part no.

Clamp Cylinder with Lock

Z + Stroke 97 40 ZZ + Stroke 57 T (mm) Symbol BX BY D F GA L M MA N NA T W WA Z ZZ Hs IA K Bore size 40 56 54 16 44 77 65 M12 x 1.5 M4 x 7 86 59 57 5 12.5 124 236 46 47 14 50 64 64 20 55 78.5 58 M16 x 1.5 M4 x 7 87.5 59.5 60 5.5 14 118.5 230.5 51 58 17 63 74 74 20 69 82 58 M16 x 1.5 M5 x 7 91 61 67 5.5 19 122 234 57.5 72 17 Note) Refer to page 14 and 15 for Accessories. 6 Clamp Cylinder with

EX510

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)