Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 100VAC 50/60HZ, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: -, Option: -

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M8 Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Push-turn Locking Slotted Style, A, B Port Size: Body Ported 1/8, Thread: -, Option: -

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M8 Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: -, Option: -

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 F W X10 NA 1 G Cable entry direction Top entry Cable entry direction Power supply voltage Switch Motor specification Matsushita Electric Industrial Co., Ltd.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to pages 17-5-53 through 17-5-55 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) Soft PBT (UL94 V0) PA66 (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PUR (Purple (RAL 4001 equivalent)) PVC (Light blue) Weight Approx. 308 g Approx. 306 g 1 m: Approx. 100 g 5 m: Approx. 355 g Approx. 47 g Approx. 53

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Integrated Controller

Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53

LV50-OMQ0002

4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g -71No.LV50***-OMQ0002-G Dimension of the cable with M12 connector lead wire (LFE-1-A3) 4 Black Blue 3 White 2 1 Brown -72No.LV50***-OMQ0002-G Revision A : Contents revised in several places.

mb1

53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

MK

0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18 23 22 65 53

Single Axis Electric Actuator Series LJ1H

m (kg) Refer to page 145 for deflection data. 32 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53

Square Tube Type Air Cylinder Series MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

2/3 Port Valve

80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53