Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: N9 (5/16" One-touch Fitting), Thread: T (NPTF), Option: F1 (Foot Bracket)

Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: T (NPTF), Option: F1

Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: W (M8 Connector w/ Connector), Lead Wire Length: 7 (5000mm), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: Rc (or None), Option: F1

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread: N (NPT), Option: F1 (Foot Bracket

Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: H (Grommet Lead Wire 0.6m), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: N (NPT), Option: F1

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: H (Grommet Lead Wire 0.6m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: N11 (3/8" One touch Fitting), Thread: N (NPT), Option: F1 (Foot Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: H (Grommet Lead Wire 0.6m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C10 (Body Ported ø10 One-touch Fitting), Thread: Rc (or None), Option: F1 (Foot

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread: Rc (or None), Option: F1 (Foot Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 2 (200VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: N11 (3/8" One touch Fitting), Thread: Rc (or None), Option: F1 (Foot Bracket)

of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: N (NPT), Option: F1

(2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: F (G), Option: F1

of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread: Rc (or None), Option: F1

(2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: T (NPTF), Option: F1

Clean Air Module

drop 1 V or less Max. 80 mA Internal voltage drop 1.5 V or less SFD NPN open collector 1 output + Analog output PNP open collector 1 output + Analog output LLB LLB LLBF (F1) P2 P6 P1 P5 LLB-F (F1) AD Brown Brown DC (+) 1 1 Black OUT1 Load GD Main circuit Main circuit Black OUT1 4 4 12 to 24 VDC White Analog output White Analog output Load 12 to 24 VDC 2 2 Blue DC () Load Load Blue 3 3 P1

Table of Contents

Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

Table of Contents

Series AR20K to 60K Regulator with Back Flow Mechanism. 7 7 9 10 11 14 15 16 17 18 19 21 21 22 24 25 25 26 27 27 28 29 29 30 31 31 32 33 38 40 41 42 43 43 43 44 45 46 47 48 49 49 49 50 50 51 52 52 52 53 53 54 55 56 56 56 57 59 60 61 62 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

7ND9071en

to +60 C -53 to +75 C -53 to +85 C NDabcdE1Ce/I59** -53 to +60 C -53 to +60 C -53 to +60 C NDabcdE1Ce/I41** -50 to +60 C -50 to +75 C -50 to +85 C Not allowed with external junction box (J, -40 C) 9.1.3.4 ND9000F/B06, ND9000P/B06 Microswitch type: OMRON D2VW-01 (B06) (gold-plated contacts, contact form is SPDT) Protection class IP67 Resistive load: 100 mA: 30 V DC/125 V AC Switch accuracy

A

Bore MM *NA P S W X Y LC LD LH LS LT LX LZ Without gaiter (mm) H ZZ 20 M8x1.25 24 1/8 77 10 15 7 4 5.5 20 53 3 32 44 35 147 25 M10x1.25 29 1/8 77 10 15 7 4 5.5 22 53 3 36 49 40 157 32 M10x1.25 36 1/8 79 10 16 8 4 6.6 25 53 3 44 58 40 159 40 M14x1.5 44 1/8 87 10 16.5 9 4 6.6 30 60 3 54 71 50 187 50 M18x1.5 55 1/4 102 17.5 22 11 5 9 40 67 4.5 66 86 58 218 63 M18x1.5 69 1/4 102 17.5 22 13 5

CQ2

Cylinder stroke Weight Option Weights Unit: g Unit: g 32 40 50 63 80 100 Bore size(mm) Bore (mm) 100 75 50 45 40 35 30 25 20 15 10 5 45 45 19 6 6 6 Both ends tapped 32 598 493 388 367 346 326 305 284 263 243 222 201 175 120 53 53 27 26 Rod end 40 748 628 508 485 462 439 416 393 370 347 323 300 175 120 53 53 27 26 Male thread Rod end male thread 50 1184 996 808 771 735 699 663 626 590 554

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

NT-16 160, 180, 200 M36 x 1.5 21 55 63.5 53 7-6-111 112 Series CQ2 Dimensions: 125, 140, 160 The dimensions are the same with or without an auto switch.