2-Color Display

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.

Direct Solenoid

5 1 . 1 Eody '/bEooy ,l3lnt|yr.rdudos body and (2) rodd| pltls. v.' Body AlBafiUy lrr|r|dr bodv *rd 12) bqd.n dns. 1sl $!ool A Sbr As,y. 1 Spdn9 A,ICI338 1 -!sqp!r arr$&5 q!!!o 1 Spec6r arr338.l 7 a,rl3s&s Sol. Ga3kt 4xT33314 9. 1 I 115'120 V 5ffi0 Hz 220/2{0 V glto Hz z v 50to Ha a@t{}9 am1-r0 aml{7 I Sol. Cap Arsy. (Rut$r acc68s ptug) I Sol. Cap A3sy. {RacBd nontock op6r.) c. Sol.

MXQ

M9P 3-wire (PNP) M9BV M9B 12 V Relay PLC 2-wire Grommet 24 V Yes F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked with are produced upon receipt of order.

Vacuum Unit Ejector / Vacuum Pump System

4] [5] [1] Rated pressure range and function E 0 to -101 kPa Pressure switch for vacuum Open collector 2 outputs F -100 to 100 kPa V -100 to 100 kPa Pressure switch with energy saving function Open collector 1 output [2] Output specifications [3] Unit specifications Nil Unit selection function Note 1) A NPN M SI unit only Note 2) B PNP Note 1) The unit selection function is not available

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

AC Servo Motor Driver (MECHATROLINK-II type)

Refer to LECYM Operation Manual, Section 4 and Section 5 and Section 10 for details. 6.1 The recommended value of the parameter [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

PF-OMN0009_C

C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4000 Plug-in Unit Bottom ported drawing VQC 130 127 SQ U side 96.5 62 44 2n-Rc 1/4 73 9 9 VQ0 4(A), 2(B) port 2-G 3/4 VQ4 37.5 (Conduit port) X 12 X 12 n VQ5 B A 8 VQZ 2 4 B A 7 VQD 2 B 2 B 2 B 2 B 2 B 2 B 4 6 A A A A A A B B B B B B SMC SMC SMC SMC SMC 5 L1 L2 4 3 2 P = 25 44 P = 25 50.5 1 2 Stations 38 26.5 (External pilot port) 2-Rc 1/8 10.2 37.5 12 91 43.5 D side 163 50.5 59 96.5 Formula

AC Servo Motor Driver (MECHATROLINK-III type)

C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V

A_HEC-OM-K001

V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

0.

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

2-Color Display High Precision

Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +

Series MLGP

Minimum auto switch mounting stroke (mm) Bore size (mm) Auto switch Number of auto switch mounted 20 25 32 40 50 63 80 100 model 1 pc. 5 D-A9(V) D-M9(V) 2 pcs. 10 1 pc. 5 N o t e 2 ) D-M9W(V) D-M9AV 2 pcs 10 1 pc. 5 N o t e 2 ) D-M9A 2 pcs. 10 N o t e 2 ) 1 pc. 5 N o t e 1 ) 5 D-Z7/D-Z80 D-Y59/D-Y7P 2 pcs. 10 1 pc. 5 D-Y69 D-Y7PV 2 pcs. 5 1 pc. 5 N o t e 2 ) D-Y7W(V) D-Y7BA 2 pcs. 10 N o

IZx-OMR0035

No.: IZ-OMR0035 2) Static neutralization area (Air flow setting: 10, Discharge time from 1000 V to 100 V) IZF21 IZF31 300 mm 300 mm 3) Static neutralization area (Air flow setting: 1, Discharge time from 1000 V to 100 V) IZF21 IZF31 5-2.

E-P HYREG

Port 2 (A) pressure (MPa) Port 2 (A) pressure (MPa) 0.8 0.8 0.8 0.7 0.7 0.7 0.6 0.6 0.6 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 VY1D00-5 VY1B0-5 VY120-5 1 0 1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Vacuum Unit Ejector / Vacuum Pump System

-101 kPa Pressure switch for vacuum Open collector 2 outputs F -100 to 100 kPa V -100 to 100 kPa Pressure switch with energy saving function Open collector 1 output [2] Output specifications [3] Unit specifications A NPN Nil Unit selection function Note 1) B PNP M SI unit only Note 2) Note 1) Unit selection function is not available in Japan due to new measurement law.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.