Electric Actuators

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Aluminum High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

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W K HT HB HC N X A 2-Plug 4-Counterbore dia.

Air Cylinder

MM R1 MM CJP ND E1 NX1 A U1 R2 H Z E1 NX U1 LB A A NX A1 CJ2 A1 U1 LB JCM Part no.

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

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2 LJ1H20 Vertical Mount Specification X70 Stroke 2 F P K A 1 2 LJ1H20 Dust seal specification Refer to Table below.

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K S (Plug) FB FA C + Stroke B + Stroke E A + Stroke G For bore size 16, M5 x 0.8 is only available.

Hydraulic

: CHAD 2-Rc P Cushion adjustment screw V T GA 4-J GB Air release Width across flats G CDH9 MM R (max.) d W D E W a MA CX 0.3 F NA NB U A K C L 0 -0.3 S + Stroke H B Z + Stroke RR ZZ + Stroke With rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d F G GA GB J K L MA MM NA NB P R RR S E +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

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to Z kgm2 IB m1 m2 r1 r2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n

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Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

5

AL H1 A AL H1 Width across flats B1 Width across flats B1 CX CX K K N N F CZ N N F CZ B C B C H ZZ + Stroke Z + Stroke S + Stroke RR1 L H ZZ + Stroke Z + Stroke S + Stroke RR1 L A pin and retaining rings are shipped together with double clevis and/or double knuckle joint.

LJ1H

X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.

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SE1(L)-14/-15 I Z In the event of setting, use a flat head screwdriver suited for the groove of a trimmer, and rotate it lightly with a fingertip.

Rotary Actuator/Vane Type

CRJ X Y1 Parallel key dimensions X Y1 CRA1 Z Z h L1 b CRQ2 B port A port 2 x Q3 2 x Q2 B port A port 2 x Q3 b (h9) h (h9) L1 MSQ 4 0 0.030 4 0 0.030 20 MSZ A A A parallel key is used instead of single flat for size 40.