Environment

500 600 Speed [mm/s] Speed [mm/s] LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 70 Lead 3: LEY25C Lead 3: LEY25C 30 Horizontal work load [kg] Vertical work load [kg] 50 55 60 Lead 6: LEY25B 20 40 Lead 6: LEY25B 16 30 Lead 12: LEY25A 10 20 8 10 Lead 12: LEY25A 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY32m LEY32m for acceleration/deceleration

MLGP

80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) 9-11-16 16 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting (Ball bushing bearing) (31) l2 = 50 mm V = 400 mm/s (32) l2 = 100 mm V = 400 mm/s MLGPL20/25 MLGPL20/25 4 4 25 25 25 25 25 CL 25 Load weight m (kg) Load weight m

MLGP

Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

Aluminum High Vacuum Angle Valve

/60 Hz With light/surge voltage suppressor (Non-polar type) XL XL U 5 24 VDC 6 12 VDC S type: Not available for AC.

CJ5-S

6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

CJ5-S

6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

MNB

6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Integrated Controller

90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000

MLGP

80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30

MLGP

80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30

CXS

(6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Thread type Nil Port location 6 to 25 M thread Rc 1/8 NPT 1/8 G 1/8 P Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

CXS

Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil

C95

6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to pages 6-9-12 to 6-9-18.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6 and @1 from the above chart 40 MGZ40-PS 50 MGZ50-PS 63 MGZ63-PS 80 MGZ80-PS Seal kits consist of items !

70astamb1

Contents NCA Specifications 32 40 50 63 80 100 MB32-PS MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS Action Double acting, Single rod 32, 40, 50, 63, 80, 100 1 MPa 0.05 MPa Air cushion Screw-in type 50 to 1000 mm/s Set of the above nos. !4 (2 pcs.), !5, !6, !8 DBore size (mm) Max. operating pressure Min. operating pressure Cushion Piping Piston speed -X Seal kit includes !4 to !6, !8.

mb1

MM 2-RcP G G MM D D e e Effective thread Effective thread 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84

Compact

LEMB25 LEMB32 0 2 4 6 8 10 12 14 16 18 20 22 12 Combining with external guide 10 Combining with external guide Work load [kg] Work load [kg] 8 6 External guide unused External guide unused 4 2 0 0 500 1000 1000 500 0 Speed [mm/s] Speed [mm/s] LEMC25 LEMC32 0 2 4 6 8 10 12 14 16 18 20 22 12 10 Work load [kg] Work load [kg] 8 6 4 2 0 0 500 1000 0 500 1000 Speed [mm/s] Speed [mm/s] LEMH/HT25

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

Single Axis Electric Actuator Series LJ1H

10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 217 60 50 Z section 74 Stroke + 125 (table movement range) 208 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 407 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 9.4 3-5H10 depth 5 4.5 10 18 Stroke + 145 80