AMF

O.D.112 X I.D.90 X T3 5 pcs. Packing NBR O.D.112 X I.D.90 X T3 1 pc. O.D.112 X I.D.90 X T3 3 pcs. t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

HEC-OM-S019

Alarm b contact (CLOSE During Alarm) 10 Temperature Alarm Common 10 10m 02 2m 04 4m 06 6m N AC100V L AC100V 6-8 PT-RTD 5 Unused 9 Unused RS-485 Communication connector Note: Always use shielded cable connected to this connector. 6-9 Unused 3-4 Unused 3-5 Unused 1-3 Unused 12-14 Unused 1 BUS + 2 BUS 5 SG 4 FG 15 FG Power supply connector (IEC60320,C14) E PE HEA100 1 2 Specifications Continued

VER2000/4000

5 !6 q w e r t y u i Block packing !

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.

Drain Separator for Vacuum Series AMJ 1

Description AMJ3000 AMJ4000 AMJ5000 AMJ-EL3000 AMJ-EL4000 AMJ-EL5000 Element assembly w AMJ-CA3000AMJ-CA4000AMJ-CA5000Bowl assembly Note) e 111512 111636 111636 NBR O-ring r 111710 NBR O-ring t Note) Refer to the above for How to Order Bowl Assembly. 13-13-4 5 Drain Separator for Vacuum Series AMJ Dimensions AMJ3000/4000 L F A Bracket (Option) G K M D J C E H H OUT IN ZX ZR 2port size

Flame Resistant

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1 Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS21F-W2D Series Needle Valve/Flow Rate Characteristics Construction AS2201F-G01, AS2211F-G01 AS2201F-G02, AS2211F-G02 e t w u Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa o !

AS

Note) AS-FP Metric size Inch size Meter-out Meter-in 0 1 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 AS-FM 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.

GA342

3 Port Air Operated Valve Series VGA342 How to Order VGA342 04 A Passage Port size Thread type 04 1/2 06 3/4 10 1 A B Rc F G N NPT T NPTF Nil Normally closed (N.C.) Normally open (N.O.) Specifications Return mechanism Air + Spring Type of actuation N.C./N.O. (Changeable) Operating type Air operated type JIS Symbol N.C. N.O.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

VM100F

Sufx for actuator1 Inch size Metric size S Hard steel roller R Red Color of push button, selector B Black G Green Y Yellow 23 3.2 04 4 06 6 01 1/8" 03 5/32" 07 1/4" For selecting applicable tubing O.D., refer to the Model on page 2. Metric size and inch size types can be visually identied by color of the release button.

VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 11 4 11 4 220 VAC 50/60 Hz 24 VDC 12 VDC 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Threadtype Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

Exhaust Cleaner for Clean Rooms AMP Series

5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

ALF400 to 900, ALT-5/-9

ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Nil Description Applicable model Symbol 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 8 3 B With bracket

Industrial Filter FGD Series

material C E T F B S T G H P M L J Nylon/Fluororesin (Antistatic specifications) Fluororesin Fluororesin (Antistatic specifications) Note) If there is a static charge, select a product with an antistatic specification.

P

0 q t w o OUT IN t u e y OUT IN y e r No.

21- AF-A 10- Series Air Filter

With bowl guard (Nylon bowl) Note 7) Note 7) Note 7) Note 7) + Semi-standard t c With drain cock J Note 4) Drain guide 1/8 Drain guide 1/4 + d Flow direction Nil Flow direction: Left to right R Flow direction: Right to left + e Pressure unit Nil Name plate and caution plate for bowl in SI units: MPa Z Note 5) Name plate and caution plate for bowl in imperial units: psi, F Note 8)