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Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 2 Calculate corrected air flow by using A or B and C. Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) 3 Select a model having an air flow capacity that is higher than the corrected air flow.

(Allowable SW power supply range: 19.2 V to 28.8 V) Fig. a Fig. b Summary of Product elements Double Single Double Double Double Single Double Double No. 0 2 4 6 Side A No. 5 Side A 0 2 3 5 Station Station 1 2 3 4 1 2 3 4 6 No. 1 3 5 7 Side B No. 1 4 6 Side B R O I PROCESS FIELD BUS F R P Voltage drop of max.1 V B U S PWR(V) RUN DIA BF H L H L ADDRESS + EX250 Free EX250 DIA BF PWR(V) RUN

[ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 W 5.5 0 0 2.5 W 7.5 2.0 2.0 0.5 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 A 16.5 15.0 22.0

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 7.5 8.4 7.1 7.9 6.8 7.2 6.5 6.9 7.6 (2.4) 9.3 (2.4) C [dm3/(sbar)] 7.5 8.7 7.4 8.6 6.3 6.5 7.9 (3.4) 9.5 (3.4) 6.1 6.5 b 0.34 0.38 0.40 0.37 0.38 0.40 0.41 (0.47) 0.39 (0.46) 0.36 0.41 b Cv

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 3 position pressure center Operating pressure (MPa) SYA SYJA Flow Characteristics/Mass VZA Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Function Port size Pilot port size Mass (kg) b Cv b Cv Valve model VFA 2 position single 2 position single 2 position double 3 position

-X10 X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Ordering example) Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with drop prevention cover The main unit is shipped fitted with a drop prevention cover available as an option.

-General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

B dimension is 77.5 mm. Example Calculation:25, B dimension 27.5 mm (without switch) 27.5 (B dimension) + 50 (st) = 77.5 (mm) 2 Series CQSY Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQSS.

A B C E Applicable clip Clip for P7 Clip for P10 Conforms to JIS B 2401 dimensional standard for O-rings for industrial applications.

B MY CY 22 (20) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A CX D-A9V D-M9V D-F9WV D-X 20( ): Denotes the values of D-M9V, D-F9WV. 5(7) B W Data D-A9, D-A9V D-F9W, D-M9 D-F9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5

Cv b Cv b Cv b Cv Grommet VTA315 1.6 0.30 0.39 1.7 0.39 0.45 1.9 0.38 0.49 1.7 0.36 0.45 0.16 VOA315 1.4 0.12 0.33 1.2 0.18 0.29 1.5 0.16 0.35 1.2 0.13 0.28 Construction/Dimensions Precautions Breathing port of diaphragm Pilot port Rc 1/8 Be sure to read before handling.

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

VHS One-handed operation Two-handed operation Clamping Press fitting with an air cylinder, Caulking Application Examples 1681 Two Hand Control Valve VR51 Series RoHS How to Order VR51 B C06 Option Two hand control valve Nil B None With bracket Silencer (Accessory) Connection piping size Flame resistant One-touch fitting C06 C07 Flame resistant One-touch fitting 6 Flame resistant One-touch

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2.

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

B L1,L2,L3: A L,N: PE A PE IDF60-20-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0 8.5mm 9.5mm IDF60-30-T, IDF70-30-T,IDF80-30-T, IDF90-30-T M3.5 8.5mm [3.2.5 ] IDF60/70/80/90 Series 12-3 IDX-OM-W093 T 12.5 IDF60/70-20-T A B AC 200/200,220V 50/60Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/