HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02 03 04 06 10 12 14 20 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 R NPT Nil N 200 300

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

PSxx-OMM0002CN

24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19) 1 [P_1][n_1] 1 1 2[P_2][n_2] 2 (P1L P1H ) P1L()P1H() (n1L

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

How to Order

(With gasket and screws) Body option Electrical entry M: Main/Pilot valve common exhaust type 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Manual override Grommet L plug connector M plug connector M8 connector M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) G: Lead wire length 300 mm MN: Without lead wire WO: Without connector cable Nil: Non-locking push

10-SYJ3000

Electrical entry 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Grommet L plug connector M plug connector M8 connector E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable CE-compliant +Nil Q +CE-compliant Note) CE-compliant: For DC only. + + H: Lead

Series DXT474

For other voltages, special order request will have to be submitted. 2 Base Mounted Configurations Series DXT474 How to Order Solenoid Operated Valve DXT474 * * * * * * Type of Actuation Manual Override 1 Normally Closed Nil Non-locking push type 2 Normally Open B Locking slotted type D Push-locking slotted type E Push-locking lever type Valve Type P Supply Valve E Exhaust Valve Light and

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

AU

1 e + !

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Ejector Valve Unit, Series ZYY/ZYX

Manual override Non-locking push type Nil D E Push & turn locking type, screw driver operated Push & turn locking type, manually operated Light/Surge voltage suppressor For electrical entry types G, H, L, M Without light/surge voltage suppressor With surge voltage suppressor Note 2) Nil S Z R U With light/surge voltage suppressor With surge voltage suppressor (non-polar type) With light/surge

ZB-OM00301

Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75-1) 2 0.2~0.33mm (1.7mm) (ACB (1mm) 22 - No.ZB-OM00301 N.C. 300

AU

1 e + !

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

fitting Applicable tube O.D.: 8, 10 L type plug connector M type plug connector DIN terminal Approx. 300 (lead wire length) Approx. 300 83.6 70.6 lead wire length ( ) 80.6 93.6 80.6 74 [75.3] 92.7 61 [62.3] 79.7 61 [62.3] Pg.7 79.7 Max.10 46 57.1 49.5 67.8 75.3 Applicable cord O.D. [52.5] [63.6] 3.5 to 7 14 Series SY3000/5000/7000 DIN Rail Manifold Exploded View SY3000 Type 60 D side R

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N