XL-OMY0001

E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

MGZ Series

Although switches satisfy IEC standard IP67 construction (JIS C 0920: watertight construction), do not use switches in applications where continually exposed to water splash or spray. Poor insulation or swelling of the potting resin inside switches may cause malfunction. 4. Do not use in an environment with oil or chemicals.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 55 A A B Section BB Long stroke type Coupling H S LJ1H202 C-700 to 1000LJ1H202SC-700 to 120010.5 35.3 P.C.D Thread Motor 8 30 26 32 13 Section AA (Housing interior) Motor mounting area detail Series LJ1H S30 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation Manufacturer Matsushita Electric Industrial Co., Ltd.

Air Cylinder NCJP Series Pin Cylinder

Series NCJP a :Available X : Not available Standard Accessories 8.8 PSI (0.6k97cm.) 20 PSI (1.2kgflcmr) 100 PSI (7kgf/cm,) 150 PSI (9.gkglicm,) 40 140"F (5 -60"C) Nose mount, Flange mount, Foot mount, Clevis mount, Trunnion mount Series NCJP BrackeklPartNo.

VFR3000-OMJ0001

() C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) ) ) ) DC 5m 1) 2) 1 ()ISO VG32 (MSDS)

, 1.32277 lb, ModelCooling methodRefrigerantControl systemAmbient temperature/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 11)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min

Thermo-chiller

2 to 45 Circulating uid CH1: Tap water/CH2: Tap water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120

VER2000/4000

Current A Pin plug shape Applicable cable (Cabtire cable) 0.75 mm2, 1.25 mm3/2 core, 3 core (O.D. 6.8 to 11.5) based on JIS C 3312 and C 3322. Outlet changing procedure To change the wire outlet, first separate the terminal cover from the terminal block.

Ejector Valve Unit Series ZYY/ZYX 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN Grommet type AC specifications (50/60 Hz) Lead wire length 3 m 1 2 3 4 100 VAC 200 VAC 110 VAC

NGIP seies

-11/4inch '{r inch soacer is added to the 1 % inch strcke cylinder o Series NCJP a :Available X : Not available Standard Accessories 8.8 PSI (0.6k97cm.) 20 PSI (1.2kgflcmr) 100 PSI (7kgf/cm,) 150 PSI (9.gkglicm,) 40 140"F (5 -60"C) Nose mount, Flange mount, Foot mount, Clevis mount, Trunnion mount Series NCJP BrackeklPartNo.

Magnet: None, Mounting: C (Rear Pivot Mount), Bore: 125 (1 1/4"), Stroke: 0150 (1 1/2"), Cushion: C (Bumper), Rod Boot: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Mounting Options: X155US (Rear Pivot Mount w/o Clevis Pin)

Magnet: None, Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0200 (2"), Cushion: C (Rubber Bumper), Rod Boot: Without Boot, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Magnet: None, Mounting: C (Rear Pivot), Bore Size: 125 (1 1/4"), Stroke: 0300 (3"), Cushion: C (Rubber Bumper), Rod Boot: J (Nylon)

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without