Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Compact

Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x

ZSE30/ISE30

Maximum load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.

VY511, VYU5

(Refer to graph A) No AW AMR AWM Graph C: The balance completion time Yes AWD 5 ITV No Is the cylinder speed appropriate? (Refer to graph B) 4 VBA Completion time (sec) 3 VE Yes VY 2 Use graph C as a guide for the balance completion time.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

EXH system Common SUP system Common, Individual Vacuum Ejector Specifications Fluid Air 0.7 MPa 84 kPa 0.2 to 0.55 MPa 0.25 to 0.55 MPa 5 to 60 C 5 to 50 C Main valve Pilot valve Poppet VJ114, VJ324M Maximum operating pressure Maximum vacuum pressure Without valve With valve Without valve With valve Supply pressure range Operating temperature range Maximum air suction volume increased

Clean Air Module

or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

Mechanically Jointed Rodless Cylinder Series MY1

400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1) 200 (12) 200 (6) Load eccentricity (l mm) (3) Selection graph L: Overhang (the distance from the cylinder

30

800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32/40 40 32/40 50 50/63 5 How to

Magnetic Separator FHM Series

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

Low torque Metal seal type Rotary joint

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

Title not found

IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Low torque Metal seal type Rotary joint Series MQR

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

Compact Electro-pneumatic Regulator Series ITV0000

angle type 2m N S L Option Option Input signal 0 Bracket (option for single unit only) Current type 4 to 20mADC Current type 0 to 20mADC Current type 0 to 5VDC Current type 0 to 10VDC 1 2 Without bracket Nil 3 Flat bracket PWR ERR Option Built-in One-touch fitting type B For single unit SUP (VAC) EXH (ATM) OUT Symbol L bracket Metric size (light gray) 4 Nil PWR ERR Inch size (orange) C

DOC1020530

Set the total current capacity to 300 mA. 300 mA is the value applicable when all I/O signals are used. The current capacity can be decreased by reducing the number of I/O points. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience. However, they can be configured by one. 11.

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread