Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 300mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 700mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC4 (w/Heavey Duty Scraper)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 500mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 1300mm, Bellows/Cushion: J (Nylon Tarpaulin+Cushion Both Sides), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 125mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 350mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 800mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

I/O Configurator (NFC version)

Wireless system configuration example 75 6.1. Flow chart for using the wireless system (Refer to Step 2) 75 6.2. System Construction Example 76 6.3. Preparation 78 6.4. (1) Input and output size of the wireless slave 82 6.5.

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

76

Obtain the correction factors A to D suitable for your operating condition from the table on the next page.

I/O Configurator (NFC version)

Wireless system configuration example 75 6.1. Flow chart for using the wireless system (Refer to Step 2) 75 6.2. System Construction Example 76 6.3.

I/O Configurator (NFC version)

Wireless system configuration example 75 6.1. Flow chart for using the wireless system (Refer to Step 2) 75 6.2. System Construction Example 76 6.3.