Large Type Vacuum Unit Series ZR

PD (vacuum breaking pressure port) Breaking flow adjustment needle M5 port PS (pilot valve supply pressure port) 1 Spacer A PE 2.5 Valve unit Attachment D 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

5 Port Air Operated Valve

The valve arrangement is numbered as the 1st station from D side. Under the manifold base part number, state the valves to be mounted in order from the 1st station as shown in the figure above. Refer to page 1520 for manifold options. 1519 VFA3000/5000 Series Manifold Options For base mounted Blanking plate assembly Mounting screw, gasket part no.

IC

AV 12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2) AU Power supply output 24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDC q0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of 0.5%F .S. or less) w4 to 20 mA (Output resistance: 800 or less with accuracy of 0.5%F .S. or less) Output: 4 points AF Command output AR Courtesy of Steven Engineering, Inc.-230 Ryan Way

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

3 Way Direct Acting NVKF 300 Series

T \ l Main Parts $mim llUlff 300 3-Pofl/nhscl 0mmud $olenoid Urlrs Series NVKF300 Manifold Soecifications Valve stations 2-20 stations (max.)

DOC1020530

Set the total current capacity to 300 mA. 300 mA is the value applicable when all I/O signals are used. The current capacity can be decreased by reducing the number of I/O points. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience. However, they can be configured by one. 11.

Thermo-chiller

D-G

LMU100/200 Series Mist Spray Unit

35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension (mm) 20 200 25 250 30 300 35 350 7.5 2 x 4.5

ARJ310

Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) This catalog is printed on recycled paper with concern for the global environment.

Ozone Resistant

100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed

Process Pump

D-DN

Series PF2W Digital Flow Switch For Water

HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP Nil D 100 to 240 VAC 24 VDC Output transistor mode COUNT PRESET FUNC. LEFT RIGHT DOWN Nil P NPN open collector output SEL.

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 300 13 16 5.5 2 x 2.8 UL1007 AWG22 4.5 16.5 For LVM12R 57 2 x 2.7 Mounting hole Push type Manual override N.O. N.C. 3 2 1 N.O.

4-channel Flow Monitor ( compatible)

D The setting time from when the input signal reaches the set value, to when the ON-OFF output actually begins working. Delay time setting can prevent the output from chattering. Delay time Shows how precisely the flow can be displayed or set by the digital flow switch.

IDX-OM-W094

/80/90 Series 6-1 IDX-OM-W094 600mm 1 2 INOUT IN OUT O IDFA60/70/80/90 Series 6-2 IDX-OM-W094 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFA60/70/80/90 Series 6-3 IDX-OM-W094 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFA60/70/80/90 Series 6-4 IDX-OM-W094 7 7.1 IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 oC 565 MPa 0.151.0 8) 1 () oC 24585% 3 oC 204 312 552 810 (ANR) 2 7 oC 300

AMC

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 1,000 1 4 3 8 1 4 3 4 1 2 , , 0.12 AMC-EL2 BE20 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 VEX How to Order AN 5 1 0 AMC 06 AMC Thread Body size Suffix Port size 1 4 std. 3 8 std. 3 4 1 std. std. 1 2 2 std. 2 std. 3 5 6 8 9 B With bracket 1 2 14 20 1 1 02 Female Female Male Female Female Male 1 Male thread 10 1 4 Male Male Male D Drain piping

AC Servo Motor Driver (MECHATROLINK-III type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

ZB-OM00301

Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75-1) 2 0.2~0.33mm (1.7mm) (ACB (1mm) 22 - No.ZB-OM00301 N.C. 300