Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

REA/REB

-2-10.)

REA/REB

-2-10.)

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.

VQ4000

Cylinder port U D U D C8 C10 C12 02 03 B CM With One-touch fitting for 8 With One-touch fitting for 10 With One-touch fitting for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Refer to page 2-5-2 (Grommet type) for wiring specifications.

Smooth Cylinder/Low Speed Cylinder

D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.

7

Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10, 3/8", 12 91 (97) 22.5 3 A VXD2 68.5 47.5 23 30 45 20 6 13.5 41.5 25 33 Model Mounting bracket dimensions One-touch fitting P a b d e f 10, 3/8", 12 58 65 67 52 25.5 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 139 VXD Series For Air/Water/Oil 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Battery-less

4 u u !2 !3 i e !5 r t w q y !6 !

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

A

AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S Nil None B Bracket C NC

Air Slide Table

Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection

5

Head flange: MBYG Port 4 x FD FB FY ZZ + Stroke FT FZ FX Head Flange (mm) Bore size (mm) FB FD FT FX FY FZ ZZ 32 50 7 10 64 32 79 141 40 55 9 10 72 36 90 145 50 70 9 12 90 45 110 164 63 80 9 12 100 50 120 164 80 100 12 16 126 63 153 202 100 120 14 16 150 75 178 202 Single clevis: MBYC Port CDH10 U L CX ZZ + Stroke Z + Stroke RR Single Clevis (mm) Bore size (mm) CDH10 CX L RR U Z ZZ 32 10+

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

REA/REB

W (kg) REAR20 10 REAR15 REAR10 1 0.5 100 200 300 Maximum speed U (mm/s) 12 Series REAR Model Selection 3 Max.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard