Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

CATALOG

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

A

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

Electric Actuators

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

Table of Contents

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

F

H O W T O O R D E R KDM M U LT I-C O N N E C T O R KDM O U T L E T T U B E O.D. N O O F C O N N E C T I N G T U B E S Inch 01 1/8 03 5/32 07 1/4 mm 23 3.2 04 4 06 6 08 8 10 10 Connections 20 20 Connections Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

V

E O U T S I D E D I A M E T E R Metric (mm) 06 6 08 8 10 10 12 12 Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 3 Universal T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Table of Contents

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Table of Contents

Note) D: Max. diameter Applicable tubing T (with seal) Male Branch Tee: KJT Connection thread (T) UNF NPT 10-32 UNF <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

Table of Contents

10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore size (mm) Part no.

ZP

(Pad diameter: 20 mm or less only) ZP T 10 F N B5 A8 With adapter From p. 62 p. 119 From p. 127 ZP T 10 F N J 10 B5 A10 With buffer From p. 65 p. 120 From p. 129 q w e r t y u Ball joint type w Pad diameter t Buffer stroke q Vacuum inlet direction T Vertical R Lateral (With One-touch fitting) 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Stroke [mm] Pad diameter [mm] 10 to 16 20 to 50 10

Function: 2 Position Single Pilot, Body Size: 3/4 Standard, Piping: Side Ported, Port Size: 1, 25A, Thread: NPTF

Function: 3 Position Closed Center, Body Size: 3/4 Standard, Piping: Side Ported, Port Size: 1, 25A, Thread: NPTF

Function: 2 Position Double Pilot, Body Size: 3/4 Standard, Piping: Side Ported, Port Size: 1, 25A, Thread: NPTF

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,650 / 1,820, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 320 ～ 370, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 55, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 520 ～ 570, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 1000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 55, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control Side Connection Type

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 750 ～ 820, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 1000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 55, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection Type

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,100 / 1,200, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 55, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection