CNA

F Steel tube G Head side flange style Auto switches are not available with steel tube.

Stroke Reading Cylinder and Counter

D M E J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5

3 Way,3 Port Solenoid Valve NVZ Series

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

HRX-OM-W002

G4 [ ] 18AWG G/Y G G4 [ ] 4 18AWG G/Y 18AWG G/Y 4 Inverter IV L2/N W W 2 2 [ ] 3 18AWG BK 18AWG BK BK 3 W V M V [ ] 2 18AWG BK WH 8 8 2 V G 3 L1/L U U 1 1 [ ] 1 18AWG BK 18AWG BK RD 9 9 1 U PM PUMP 5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

SZ3000

connector Push & turn locking type, screw driver operated G A, B port size E Light/surge voltage suppressor 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Mixed C4 C6 M5 M Without light/surge voltage suppressor Indicate in the station table below.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

CXS

0.2 (G) H A P 6.3 5 X (Hexagon socket head cap screw) F (Through) N M4 x 0.7 x 14.5 (Hexagon head bolt) M4 x 0.7 (Hexagon nut) E V (Opposite side: Same) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) (L) (Z) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) V A B C D E F G H I J L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-

PF2A/PF2W

470 g 650 g 1,100 g Port size (Rc, NPT, G) Note 1) The system accuracy when combined with PF2W3.

3

g .100 g 452 g Mounting Bolt for MKB-Z Clamp Arm Mounting and Removal MK MK Mounting: Mounting bolt for through-hole type is available.

Square Tube Type Air Cylinder Series MB1

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

ZR

Impact resistance 100 G in X, Y, Z directions, 3 times each Note) Not available on analog output type.

VDW

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

Series VCL

Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

0.5

(including AC cord, connector) IZF21 IZF31 Body 430 g 605 g Bracket 146 g 220 g Automatic cleaning unit 96 g 127 g Louver 33 g 58 g Filter 15 g 26 g Applicable standard/directive CE/cUL Functions and Indications No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating