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RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400 25 25 19.5 27 32 32 37 37 10 (12) 40 71 (79) 113 (121) 15 (16) 5.5 6 7 7 10 10 M5 X 0.8 Depth

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

S) size M5 x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked "" are produced upon receipt of order.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G

1/8 M5 x 0.8 10.9 42.4 48.7 15 36.7 41.7 18.5 12 17 R 1/4 1/8 ASN 14.4 50 56.2 19.8 41.9 46.9 23 12 19 R 3/8 1/8 AQ 18.3 61.8 70.3 26.5 57.3 64.8 28.6 17 24 R 1/2 1/4 25.9 ASV Reference dimensions of R thread after installation.

10 71.5 59 68 Applicable cord O.D. 4 to 6.5 Pg.7 29 mPm 27 50.5 58 63 25 2-3.5 (mounting holes) Manual override (non-locking) 27 0.5 0.5 P R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 NPTF VP4 VZS Type 40: Base mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS

1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) AC-type models that are CE-compliant have DIN terminals only. Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.