SMC Corporation of America
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Printed in Japan. 1st printing May, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

Drain 861 Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D. Metric Size Inch Size 6 4 Size Series Appearance 8 10 12 1/8" 3/16" 3/8" 1/2" 1/4" 2 Needle valve LVN 3 LVC 4 LVA Note) Basic size With reducer LVH Bore Through Connector P.941 LVD Tubing O.D.

controller PP+B7 1k PPB8 Current limit resistor R NP+B9 1 k NPB10 Current limit resistor R (b) Upper level equipment is PNP type Power supply for pulse train signal Positioning Unit side Inside the controller PP+B7 1k PP-B8 Current limit resistor R NP+B9 1k NP-B10 Current limit resistor R 27 - ii.

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

Theoretical lifting force of vacuum cup diameter 32mm with ZP2V-B06-05 at supply pressure 0.5 MPa Vacuum pressure Theoretical lifting force Horizontal lifting force [N]Safety factor 1/4 [kPa] [N] 1 cup gripping -50 40.2 10 2 cups gripping -67 53.8 13.4 3 cups gripping -73 58.7 14.6 (Calculated by W = P X S, S = r2, r = 32 / 2.

Options p. 8 Optional accessories p. 7 Auto Drain Valve Longer life, Higher resistance to foreign matter Shape prevents condensate accumulation Non-sliding part reduces the catching of foreign matter Poppet type Diaphragm type Condensate and foreign matter are discharged completely. Easier maintenance V One-touch mounting and removal of the bowl is possible without using any tools.

EVD EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2 N L PE OLR TB PTC PTC ILS ILS PRS TB PE EDV C02 For Option V C11 OLR PTC GFCI EDV PE CM C01 C11 PE FM PRS P 6-4 IDFA Series 6 4 IDX-OM-W017 6 6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4

2-Port size D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5

M ast er Pow er SU P. ( D C24V) PRO FI BU SD P Sl ave1 O t her D P equi pm ent Sl ave2 O t her D P equi pm ent The pressure proportional to the signal on the second side is obtained.

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

-X14 424 Ionizer IZS40/41/42 Series Specifications IZS41(NPN) IZS41-P (PNP) IZS42(NPN) IZS42-P (PNP) IZS40 Ionizer model Dual AC 6,000 V AC, DC Corona discharge type Ion generation method Method of applying voltage Applied voltage Offset voltage Note) AC, Sensing AC, DC 7,000 V IZS IZS Within 30 V Air (Clean dry air) 0.5 MPa or less 0.7 MPa 6, 8, 10 Fluid Operating pressure Proof pressure