MG

m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY

Series VQ Metal Seal/Rubber Seal Body Ported

(See p.1.10-67) How to Order Manifold 1 D 1 4 08 S VV5Q F Series Option Manifold 0 1 2 VQ0 VQ1000 VQ2000 Symbol D Option DIN rail mounting Special wiring specification (Not double wiring) With name plate Built-in silencer {Direct exhaust (U side only)} 4 Plug lead unit/Flip Cable (length) (2) Stations 0 1 2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) K 01 1 station

KJ

(mm) 2 Effective area (mm2) Weight (g) D L Q Model D KJT02-00 6 10 4.9 8.8 0.9 1.7 Q Q 3.2 5.2 Q M Q L D D M M L L Male branch tee: KJY T H A Applicable tubing O.D.

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

MGP

XAH7 (mm) XL T-slot dimensions Bore size (mm) 50 80 a 11 13.3 b 17.8 20.3 c 10 12 d 6 8 e 17.5 22.5 Section XX detail 8-RR depth RL Section XX WB Z QA WA QB Section XX 4-OA through 4-OB depth of counter bore OL 4-MM depth ML 4-NN depth NL Section XX Z WA L HA T-slot for hexagon bolt X 0.02 X 0.02 DA VB VA X X T H U PW DB PB GC XAH7 depth XL 2-P (plug) XAH7 depth XL Q J K GA GB S G FB 2-P

Vacuum Regulator

NPN open collector 1 output, Lead wire with connector (Length 2 m) PNP open collector 1 output , Lead wire with connector (Length 2 m) NPN open collector 2 outputs, Lead wire with connector (Length 2 m) PNP open collector 2 outputs, Lead wire with connector (Length 2 m) Digital pressure switch specifications ZSE30A-01-N-ML ZSE30A-01-P-ML ZSE30A-01-A-ML ZSE30A-01-B-ML 1 to 3 are assembled

Cylinder with Lock

P (Rc, NPT, G) Head end cylinder port Width across flats KA 4 x J 2 x Cushion valve GB Width across flats B1 MM E D C B H1 AL F C B N M BN A K H S + Stroke M ZZ + Stroke With bellows e 10.2 f l h + l ZZ + l + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H H1 J K Up to 500 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 50 16 12 12

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(For manifold type 20, 21R) 1 SYJ7 2 5 M 01 Body ported SYJ7 4 5 M 01 1 Base mounted Manual override 3 port Thread type Nil: Non-locking push type D: Push-turn locking slotted type Coil specifications F Nil Rc Nil Standard G N T NPT NPTF With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of D, DO, W type.

CNA

C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CNA

C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CJ5-S

m t l m L Part no.

CJ5-S

m t l m L Part no.

CNA

Tie rod Carbon steel Electrogalvanized chromated @8 Bushing Lead bronze casting @9 3.3-25 Series CNAW Dimensions Basic (B)/ CNAWBN Rc(PT)BPlock release port Lock release at pressure supply Rc(PT)BQ Rc(PT)P Plug cap with bleed GA Rc(PT)P Cylinder port at rod side GB M GD GC 4-J Across flats B1 Width across flats KA Cylinder port W With rod boot MM MM GL GR Q GL1 e D E D E T H1 AL AL 8 f l

Refrigerated Air Dryers Series IDF/IDU

VAC specification] Terminal block K L P M N H J 4 x 13 [200 VAC specification] [100 VAC specification] Power cable outlet (17) Power cable (Length: approx.1.9 m) Dimensions (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 Rc 3/8 226 410 51 232 138 24 327 240 15 125 73 31 36 154 67 304 33 21 330 473 Rc 1/2 453

RB/RBL/RBQ

J J N m/s2 1.

RB/RBL/RBQ

J J N m/s2 1.

Free Mount Cylinder

S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Stopper Cylinder

-DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A + 2 stroke B + Stroke V H

CY1

B Counter bore depth C 2 x 4-MM thread depth M 4-J x E (depth) H 2-P (piping port) Y T T HA CB L HP TC F X WP GW GP WS QW PW D 4-LD W K With switch rail Plug HS Q + Stroke G Z + Stroke HR CR Area E (Area E) For CY1R25, 32, 40, 50, 63 (mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2