3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator

High Power Cylinder:

5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

MHY2/MHW2

MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch 2.8-9 Series MHY2 Construction Closed 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Series 10-, 21- AF-A Air Filter

R.

Air cooled Thermo-con (Compact type)

Content One of two symbols, R or W. R: Read data from the product W: Write or store data to the product Identification The classification symbol (identification code) of read or written data with 3 digit alphabetical ASCII codes. Refer to page 3-9 3.9 Identification Code List. Numeric data Read or written data with 5 digits regardless of its type.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

ZMA

ZF ZP ZCU How to Order Ejector Manifold AMJ ZZMA 06 06 R Misc. Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port.

I

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Precision Regulator

Displ m Displ m Block diagram spring Compd. spring Compd. m M Pa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m 2 Force N -6- 3. How to order (Note 1) In the standard mounting position, the product name plate is attached to the front and the bracket is mounted to the back when viewed with the SUP side on the left and OUT side on the right. (Note 2) Accuracy: 3%F.S.

Digital Flow Switch (Remote type monitor unit)

Option Part number Remarks Panel mount adapter ZS-26-B Waterproof seal with screws Front protective cover + Panel mount adapter ZS-26-C Waterproof seal with screws Protective cover only ZS-26-01 Please order panel mount adapters etc. separately. Power supply/output lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-CA-4 1 pc.

VM

Cover Gasket NBR Metallic plated Plunger Body y Rolled steel u i w e Zinc alloy Metallic plated Subplate Polyacetal Valve seat o Hexagon socket head plug Rolled steel r NBR Valve t Stainless steel Spring 3.5-12 VM100 Series VM100/Side Piping Basic/VM120-01-00, VM130-01-00 VM121-01-00, VM131-01-00 JIS Symbol 2 port 3 port 20N F.O.F. 0.5MPa supply A L Model 7.5 VM120-01-00 VM130-01-00 32.5

PC Wiring System

005 PCW 01 005 V Lead wire length Lead wire length Symbol 005 010 015 020 030 050 Lead wire length Symbol 005 010 015 020 030 050 Lead wire length 0.5 m 1 m 1.5 m 2 m 3 m 5 m 0.5 m 1 m 1.5 m 2 m 3 m 5 m Contact your SMC sales representative regarding connector cables with lead wire lengths other than those in the table above.

3 Port Air Operated Valve Series SYJA300

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

HRX-OM-M091

HRX-OM-M091-P Operation Manual Communication function Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20HRS030-A-20HRS030-W-20HRS040-A-20 HRS040-W-20HRS050-A-20HRS050-W-20HRS060-A-20HRS060-W-20Keep this manual available whenever necessary 2022 SMC CORPORATION

HRX-OM-Q033

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-Q033 Chapter 5 Simple communication

HRX-OM-S010

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS100/150 Series 5-20 HRX-OM-S010 Chapter 5 Simple communication

Pressure Gauge Guide

G43-4-01 to 02 G43-6-01 G43-7-01 to 02 G43-10-01 to 02 8 1 R , 4 1 R IC 8 1 R MPa 8 1 R , 4 1 R VBA Note) Do not apply pressure more than the maximum display pressure.

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication