Compact Please contact SMC for water resistant products. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM Water resistant (2-color indicator) 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ * Solid state auto switches marked with are produced upon receipt of order. * There are other applicable auto switches than listed above.
RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40
x 100l 115 x 115l 50 (M) 100 50 (M) M5 x 55l 140 CHKDB25 x 140l 75 (M) 55 5 (M) x 60l 165 x 165l 100 (M) 60 10 (M) x 65l 75 CHKDB63 M12 x 75l 5 (M) 65 15 (M) x 70l 80 x 80l 10 (M) 70 20 (M) x 75l 85 x 85l 15 (M) 75 25 (M) 10.4 x 80l 90 x 90l 20 (M) 80 30 (M) x 85l 95 x 95l 25 (M) 85 35 (M) x 90l 100 x 100l 30 (M) 90 40 (M) 16 x 95l 105 x 105l 35 (M) 95 45 (M) x 100l 110 x 110l 40 (M) 100
1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !
When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.
13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon
i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014
3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !
Electrical entry G Body Coil voltage Lead wire length 0.6 m 5: Plug lead sub-plate 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet H Function Nil Y(1) R(2) Standard type (1 W) Low wattage type (0.5 W) External pilot Seal 0 1 Metal seal Rubber seal Note 1) Note 2) Applicable to DC specifications.
Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".
Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.
This can cause damage to the valve body. 482 Series LVH Manually Operated Integral Fitting Type/Threaded Type Construction Integral fitting type Threaded type u u q q e w e w LVC A B A B r LVA Description Material Parts list No.
Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.
IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.
Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port. The pressure difference generated at this time lets the check valve open y and the residual pressure on the A port side is quickly exhausted from R port.
23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411