42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

MY1

3 e w !6 r !9 Note) With top cover removed !

Refrigerated Air Dryers Series IDF/IDU

How to Order AT Refrigerant R407C IDF120D to IDF240D IDF IDU IDFA IDF 120 D 3 9 220V 240V 380V 400V 415V 440V Nil C M R W IDFB Size ID Size Compressor size 120 150 190 240 120 kW IDG 150 kW Option 190 kW AMG Option Symbol 240 kW None Nil AFF C M R W Anti-corrosive treatment Voltage With motor type auto drain AM With circuit breaker Symbol Voltage Note) Water-cooled condenser Three-phase

Fluoropolymer Piping Equipment

W is width across flats dimension. M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.

LEC-OM02704CN

3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Digital Flow Switch (Integrated display type)

2200 0x0898 0 R/W Accumulated-value holding function U8 0 Y 2400 0x0960 0 R/W Display OFF mode U8 0 Y 0: on 1: oFF 1 R/W Security code Used/Not used U8 0 Y 0: invalid 1: valid Security code Used/Not used 2410 0x0960 2 R/W Security code S16 0 Y Security code 0 to 999 0: Normal 7000 0x1B58 0 W Communication OUT output test U8 N (Normal output) 1: Fixed (Fixed output) 0: Flow rate 16: OUT1

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Valve Single Unit

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Valve Single Unit

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Stability of suction position,

2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Table of Contents

r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

SI Unit for Vacuum Manifold

Vendor defined parameters Index(dec) Subindex Access Parameter name Size[byte] Data Storage Section 0x0040(64) 1...16 R/W Pressure P1 2 Y 3.4.1 0x0041(65) 1...16 R/W Hysteresis H1 2 Y 3.4.2 0x0042(66) 1...16 R/W Pressure P2 2 Y 3.4.3 0x0043(67) 1...16 R/W Hysteresis H2 2 Y 3.4.4 0x0044(68) 1...16 R/W Pressure P3 2 Y 3.4.5 0x0045(69) 1...16 R/W Hysteresis H3 2 Y 3.4.6 0x0046(70) 1...16 R/W

Electric Actuator

Note 2) L B + Stroke ;R W 4 x NA thread effective depth NB A + Stroke M EH S Incremental encoder Absolute encoder Stroke range HB HA EV EH D C B (mm) Size Without lock With lock Without lock With lock W A W A W A W A 274.9 299.9 291.3 321.3 233.4 258.4 251.1 281.1 274.5 299.5 290.6 320.6 238 263 262.7 292.7 15 to 100 136.5 161.5 156 186 25 87 123.9 82.4 123.5 71.5 20 44 45.5 M8 x 1.25 13

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

ACTUATORS: AIR CYLINDERS SERIES NCJ2 H O W T O O R D E R NCJ2 N O N-R O TAT I N G D O U B L E A C T I N G S I N G L E R O D C Y L I N D E R PART NUMBER OF MOUNTING BRACKETS Mounting Bracket Bore Size (mm) NC J2K 10 16 Foot NCJ-L010B NCJ-L016B NC J2K Flange NCJ-F010B NCJ-F016B A U T O S W I T C H C A P A B L E N U M B E R O F S W I T C H E S Not Switch Capable D Switch Capable With Built-In