SMC Corporation of America
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q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Position of pivot:Axis , w P s 1 2 OSo||t dob. of pivot: Passes through the center ol gravity, parallel to Position of oivot: Diameter Position side b, s 1 2 ,_w 2f " s ' s oThh dhk Position of pivot: Passes through one end perpendicular to the plate. Position ot pivot:Diameter .r=W.ts s 4 World Wide QS\E Support...

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

A A' A' R H R H Piston seals Wide size variations from 20 to 100 Model Counting Rod end configuration Standard stroke Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 R(D)Q25 20 to 100 Direct mount auto switch 32 to 100 rail mount auto switch Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type R(D)Q32 R(D)Q40 Female threads Male threads R(D)Q50 R(D)Q63

R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

0 #0 w @9 !2 #3 @6 @7 !9 qo r !3 @1 e #1 #4 @0 !8 t @3 B' CL !7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

CL CL1 MLGC CNG MNB Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 CNA Caution CNS 1. Be sure to connect the load to the plate section with the lock in an unlocked condition. If this is done in the locked state, it may cause damage to the lock mechanism.

0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

= 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with

rua i Lishl 'ni'ng dr.d iFolec''v r-o'" . --{%!fi; ,Ek---p i Ughr6ftdrn9drcd.i ^9 ixrf*H rill.l+r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P.

MSQ Backlash 2 or less For detailed explanation of effective output, refer to the description on p.1.5-5.

When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work

circuit EXH w Exhaust solenoid valve q Air supply solenoid valve u Pressure sensor r Diaphragm EXH e Pilot chamber y Exhaust valve u Pressure sensor t Supply valve r Diaphragm e Pilot chamber EXH t Supply valve SUP SUP OUT OUT EXH ITV1000 ITV2000, 3000 Block diagram Supply pressure q Air supply solenoid valve Input signal Output pressure r Diaphragm i Control circuit Pilot valve w Exhaust

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

O PERATI O N M AN U AL E/P REGULATOR M O D EL N AM E ITV1000, ITV2000, ITV3000 series Seri es CO N TEN TS Cont ent s P1 Saf et y i nst ruct i ons P2 H andl i ng precaut i ons P3 Speci f i cat i ons P4 W i ri ng m et hod P5 Pressure set t i ngs P6 Error i ndi cat i ng f unct i on P6 U RL ht t p: //w w w . sm cw orl d. com 1 Saf et y i nst ruct i ons These saf et y i nst

R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M

Cylinder with Lock Series MNB Taper ring Steel ball P f R R High locking efficiency Improved locking efficiency, as well as stable locking and unlocking (unlocking pressure 0.25MPa. 0.05MPa compared to conventional P/A products) have been realized by arranging a large number of precision steel ball bearings in two circular rows.

IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA RE A B Both Ends Tapped (mm) Bore size (mm) O1 R O1 thread REC R R 32 M6 x 1.0 10 40 M6 x 1.0 10 CX 50 M8 x 1.25 14 CY MQQ M RHC H thread effective depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S