High Power Cylinder Series RHC

M14 x 1.5 201.5 6.8 to 11.3 3/8 40 50 to 100 EA H EA FA GA A NE Rc P Rc P GA M Effective thread K WH ND H1 MM I C B D E LY 4-LD LH0.2 LT JC Y X JC Y X S + Stroke NF LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 50 H1 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

33

Note 2) If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water).

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

PSE540/560

Z directions, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case:

q"s

Plessure characteristics ser oressure: 0.05 r pa Flow characteristics suppry pfessure: 0.2 MPa Relief flow characterislics supp y pressure: 0.2 tvpa 0.251 arf 0 1 5 | ...l o ooj 200 400 600 Frow rare (l/min iANR)) series ITV 1 000/2000/3000 Series lTV301n Hysteresie Repeatability Pressure Characteristics ssl pGssurB: 0.05 Mpa FlOw CharaCtetistics sLppty pressur: 02 Mpa Reliel llow characterislics

MGC

) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable

MQQ

Y 4-LD X X LG LT 28 10 to 50, 75, 100 104 123.2 12 6.6 4 33 LS + Stroke LX LZ RE A B A + Stroke B + Stroke L REC 25, 28 Bore size (mm) LS LT LX LY LZ X Y CX 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT MQQ M 28 88 3.2 64 64 78 11.2 7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Title not found

bracket and gauge ootion avarable X43O/X440 on y av4rade w th BEckel (B) and cauge (c) Standard BacKlow mechanism Optional specif ications Symbol Description Applicable Thread type [Ietric thread (M5) Rc NPT G o 02 to 0 2l\rPa setlinq Non-rclieving AF10 to 60.

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

MQQ

Y 10 to 60 51.2 34 10 6.6 4 16 24 LT LX LZ LS + Stroke 10 to 60 54.7 37.5 10 6.6 4 20 26 10 to 50,75,100 61.2 42 12 6.6 4 25 30 A + Stroke 10 to 50,75,100 67.7 48.5 12 6.6 4 28 33 25, 28 L B + Stroke Bore size (mm) LS LT LX LY LZ X Y 19.5 2 38 33.5 48 8 10 5 M LY 22 3.2 48 42 62 9.2 16 5.8 LH 22.5 3.2 52 46 66 10.7 20 5.8 Y Y X X LG 4-LD LX LT 26 3.2 57 57 71 11.2 25 5.8 LS + Stroke 32.5

Swivels

0216 16 Y D Swivels Material and Finish: Blank = Carbon Steel w/Zinc & Yellow Chromate Plating (Std.)

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

High Power Cylinder:

0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

Air Cylinder CP Series Cylinder Positioner Assembly

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.