3 Port Air Operated Valve VPA3145/3165/3185 Series

52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

At a time of shipment from the factory, it is set such that the security code is not required. 14 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

operated poppet valve Air/Inert gas 0.7 MPa 0 MPa/101.2 kPa ON: 4 ms 1, OFF: 2 ms 1 10 to 50C Note 2) Valve specifications Electrical specification Minimum operating pressure / Vacuum Response time Note 1) L plug connector Base mounted L plug connector Body ported Ambient and fluid temperature Lubrication Manual override Impact / Vibration resistance Note 3) Not required Non-locking push type 150

Exhaust Cleaner for Vacuum Pump AMV Series

175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

Series AP3100

max 15 in. (0.4 m) Option: 10 in.(0.25 m), 7in.(0.18 m), 5 in.(0.13 m) Face seal, Tube weld Bottom mount 0.76 in3 (12.52 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Installation Internal volume Mass Knob LOTO (Lockout) 3 lbs (1.36 kg) 3) Round knob with open/close indication window N/A 3.20 lbs (1.45 kg) 3) Pull twist knob 4) Standard 1) 14

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 531 Speed Controller: Standard Type In-line Push Locking Type Series AS RoHS Model/Specifications Lock speed setting, with the touch of a button It can be locked only by pushing the handle after adjustment.

SI unit for EtherNet/IP TM

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

EX250-SEN_eng

. : : : : : Green flashes EtherNet/IPTM-level communication not established 14 0 1 1 1 NS Green light ON Element Description Multiple EtherNet/IPTM-level communications established DHCP mode 1 1 1 1 CLEAR/HOLD Communication connector Connect the EtherNet/IPTM line.

LV50-OMQ0002

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

LFE-OMZ0012

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

AS-FPQ/AS-FPG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

PA3145/3165/3185

52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

VT307

Function plate (With gasket) Note) DXT152-14-1 Mounting screw NXT013-3 Qty. 1 pc. 2 pcs. A B Note) DXT060-51-13B, DXT152-14-1B are for energizing continuously.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.