1 High Purity Chemical Valve Compact Type Series LVD VC Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.
FX FZ H S + Stroke ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Long strokes Rc(PT) BQ Plug with breathing hole BC element M GA T 4-J Width across flats KA 2-Rc(PT) P Cylinder port G G Rc(PT) BP Unlocking port GL GR GB 4-FD FA MM Q FY BF D EA RY E V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C D E EA
Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27
S) PB PA PB SMC B PA A A B SMC SMC Dimensions (Max. T) (mm) S Model LVC2m LVC3m LVC4m LVC5m LVC6m Dimensions 12.5 (mm) T 24 Model LVC3m LVC4m LVC5m 29 49.5 34.5 54.5 36 60.5 With indicator With flow rate adjustment & bypass (Max. S) PB W PA A B SMC A B Dimensions (Max.
VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.
HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)
1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.
CE2 Finger options ML2B A B A B A B Basic type Tapped on upper and lower faces Tapped on all faces Using tapped holes in the body from bottom face C J G5-S CV Positioning pin holes allow for easy mounting.
CE2 Finger options ML2B A B A B A B Basic type Tapped on upper and lower faces Tapped on all faces Using tapped holes in the body from bottom face C J G5-S CV Positioning pin holes allow for easy mounting.
0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port
oC (3) VQZ 1 8 0.55 16 16 13 11 15 16 25 mm2 VQD P A P B A EA B EB VFS Air exhaust side eff area S (P2=0.5MPa) 18 mm2 VS Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.
Series MQM Accessory Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon steel Part no.
Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15
PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb
PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb
PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb
PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb
PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb
PULSE VALVE, DUST COLLECTOR VALVE, O16, 1.86 lb