Special Specifications:

Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

switch For 20, 30, and 40 R80 Grommet IC circuit 48 V, 100 V 24 V,48 V, 100 V 2-wire No Relay, R80C Connector Heavy-duty cord 24 V PLC Grommet T79 Solid state switch Connector T79C Yes S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example) R73C (Example) R73CL (Example) R73CZ (Example) R73CN 11-3-2 37

JA/JAH/JB/JS

M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5 M27 x 2 M30 x 1.5 M30 x 2 M33 x 2 M36 x 1.5 M39 x 1.5 M42 x 3 M48 x 1.5 D C B B H H C D CE1 29 29 31 34 34 34 39 39 39 44 44 48 53 57 62 72 34.6 34.6 37

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 6, 10 6, 10 17 7 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 16 16 19 8 21.9 M14 x 1 5 9.2 M5 x 0.8 4 20 20 26 13 30 M20 x 1.5 8 15 M8 x 1.25 5 25 25 32 17 37 M26 x 1.5 8 19.6 M10 x 1.25 6 T-bracket

MVGQ

TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

CQM

MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 M4 x 0.7 8-32UNC 4-40UNC M3 x 0.5 25 24 5 3 32 31.5 5 to 30 4-40UNC M4 x 0.7 8-32UNC M3 x 0.5 5 to 30 26.5 17 31.5 22 29 28 5 3 38 37

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37

CLQ

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 to 100 D-A9 D-M9 D-F9W D-A9V D-M9V D-F9WV D-F9BAL B Hs Hs A Auto Switch Mounting Height Proper Auto Switch Mounting Position D-M9 D-M9V D-F9W D-F9WV D-A9V D-F9BAL D-M9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 A B A B A B 22 22.5 25 20 25 6.5 36 3.5 37

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 37 CX 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 92 DNN-4.2 26 11.5 NN-8 -X 208.5 H 2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches

Port Size: IN: 3/8, OUT: 3/8, Voltage: 100VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 3/8, OUT: 3/8, Voltage: 200VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 3/8, OUT: 3/8, Voltage: 110VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 3/8, OUT: 3/8, Voltage: 24VDC, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 1/2 OUT: 3/8, Voltage: 100VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 1/2 OUT: 3/8, Voltage: 200VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

Port Size: IN: 1/2 OUT: 3/8, Voltage: 110VAC 50/60HZ, Compressor Operating: 4 [4 Sec/Min (2 Cycle/Min) 37~75kW

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH