SMC Corporation of America
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Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

or less Base Mounted SY SY Body Ported 300 mm/s or less S0700 Base Mounted S0700 S0700 Body Ported 500 mm/s or less Base Mounted [Common conditions] Pressure: 0.5 MPa Piping length: 1 m Load ratio: 50% Stroke: 200 mm Use as a guide for selection.

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

AS ASP ASN AQ ASV How to Order AK D 01 S AS 2 0 0 2 ASS ASR ASF Type adjustable by flat head screwdriver Body size 1 2 3 4 JIS Symbol M5 standard 1/8,1/4 standard 3/8 standard 1/2 standard With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size VT Nil Without port (For manifold) VP 02 (8A) 1 4 Light/Surge voltage suppressor VG Valve option Electrical entry D T C H G Symbol Nil S Z Option VP Nil Standard type E Continuous duty type V For vacuum Note) Note) Note) S070 S: With surge

VO301-00 (Refer to page 17-4-12 for details.) 17-4-11 8 Series VNA How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 1 DZ 23 VO301-00 With surge voltage suppressor Nil S None Surge voltage suppressor (Except DL) Coil rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Manual override Coil rated voltage

Combination of R and S (Because S function is also included in R.) Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.

B 40 30 D F CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

Male thread LDZB5L 196N 33mm/s LDZB5M 40,100,200 117N 100mm/s LDZB5H 72N 200mm/s Model Max. thrust Max. speed Lead screw Motor Stroke (mm) Mounting bracket Rod end thread Cover Auto switch Slide screw 8 Lead 2 25,40,100,200 LDZC3L 80N 33mm/s Slide screw 8 Lead 6 Slide screw 8 Lead 12 Slide screw 12 Lead 2 Slide screw 12 Lead 6 Slide screw 12 Lead 12 LDZC3M 43N 100mm/s LDZC3H 24N 200mm/s

S070 Nil Standard (Internal pilot) R External pilot Manual override VQ Option Light/Surge voltage suppressor Nil Push type Rated voltage B Locking type (Slotted) Nil None VKF 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz C Locking type (Manual) With light/surge voltage suppressor (Type E, T, D, or Y only) Z Option VQZ 110 to 120 VAC, 50/60 Hz S With surge voltage suppressor (Type G only) 4

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

3-5 IDF60/70/80/90 Series 2-1 IDX-OM-W093 () IDF60/70/80/90 Series 2-2 IDX-OM-W093 3 3.1 50kg IDF60/70/80/90 Series 3-1 IDX-OM-W093 3.2 3.2.1 (85%) 245 050 () 2000m 600 mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14 1 IDF60/70/80/90 Series 3-2 IDX-OM-W093 3.2.3 60 65 65 IN OUT (OUT) (IN) IN OUT IDF60/70/80/90 Series 3-3 IDX-OM-W093 3.2.4 12mm 5m8mm SO O S

The piston speed may exceed the maximum operating speed of 500mm/s if the piping is directly connected to the cylinder. Please use speed controllers by SMC to adjust the piston speed so that it will not exceed 500mm/s.

TDe8 TR W W D D E E d d TY M a MA MA M a C K F NA F NA A K A B H S + Stroke H + Stroke 0 -0.5 TX ZZ + 2 strokes TZ (mm) Bore size (mm) E H TR A a B C d F G GA J K M MA MM NA P R S T D TDe8 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089 -0.050 -0.089 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074