HRL (Example 1) Users system side To the thermo-chiller 24 VDC +24 VDC (Output) 1 2 +24 VDC (Input) EXT 24 VDC EXT 24 COM Power supply 14 24 COM (Output) 24 COM Run/Stop When using a users power supply, connect the 24 VDC + side to pin 2 and the COM side of each contact input signal to the users power COM.
(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Port size Basic, Foot, Front flange, Rear flange, Single clevis, Double clevis, Centre trunnion, spherical bearing Mounting Standard Stroke Bore size (mm) Standard stroke (mm) Max. stroke ISO Symbol Double acting 32 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50
A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Note) This is a manual fluid fill port that is different from the automatic fluid fill port.
VHK 3 x 4.5 mounting hole 5 x Rc 1 4 VH Toggle lever VFM250-02-08 Panel mounting hole VHS 2 x M18 x 1 Hexagon nut thick 5.5, across flats 24 VHS Max. 7.5 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 5 x Rc 1 4 0.5 MPa supply T.T. 15 N F.O.F. 3 x 4.5 mounting hole 40 2339 Series VFM200 Series VFM200 Push button (Mushroom) VFM250-02-30R/B/G/Y Panel mounting hole
(mm) Steel piping size Universal type 1-B 50 In-line type 1-C Composed effective area So (mm2) VQZ3000 (16.2) = 0.7 60 Metal elbow type 2-A VQZ3000 (21.6) RE A B VFR4000 (67.0) VFR5000 (102.6) VFR2000 (16.2) 0.5 In-line type 40 VFS4000 (64.5) VFS5000 (12.6) VP50 (120) VFS2000 (18.0) 2-B 0.1 0.3 REC AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200
(Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)
(PT)1/4 VK (C6, C8) 17.5 10.5 24 (58) VZ (C10) (02) VF VFR 38.5 31.5 24.5 2.5 VP7 3 7 23.4 Mounting holes 48 VP4 45.5 10.5 (58) Foot bracket 15 15 1.5 1.5 P 3 VQ 5 1 PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ312 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ312 (R)wLwC6, C8, C10, 02 VZS 107.5
21 M16 x 2 20 9.5 11.5 M12 x 1.75 24 63 85 67 18 35.5 31 27 M20 x 2.5 24 11.5 14 M16 x 2 24 80 99 78 21 45 39 36 M27 x 3 33 15 17 M18 x 2.5 27 100 122 96 26 56 48 41 M30 x 3.5 36 17.5 22 M20 x 2.5 30 Rod end male threads a b c e h f g Part no. suffix X & Y dimensions Bore size (mm) 20 -XC61 10 24 67 12 14 M8 x 1 5.5 None -XC61R 25 28 73 14.5 17 M10 x 1.25 6.5 12 4 places on front side -XC61H
length) (For C10) Cover dia. 1.6 Cross section 0.34 mm2 (For 02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc 1/4 1(P) port 2-Rc 1/4 2(R) port 21 10 41 L plug connector (L) DIN terminal (Y) 300 89 (Lead wire length) Indicator light Pg.7 92.5 Max. 10 54.5 <59.5> Indicator light 1 P 3 R Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (
79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32
port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 V100 S Nil Rc Q CE-compliant Nil CE-compliant Port size R port: Rc 1/8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body
Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1
VDC 12 VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.
79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32
1/4 Lock unit MLU 160 Rc 3/8 180 200 Rc 1/2 ML1C 250 Rc 3/4 D3.
Lead wire length (m) Load voltage Auto switch model Electrical entry direction Special function Electrical entry Indicator light Wiring (Output) 0.5 (Nil) 3 (L) Applicable load Type AC DC 12 V In-line 24 V 100 V 12 V 2-wire Reed auto switch Grommet Yes Relay, PLC A93 3-wire (NPN) M9N 24 V Solid state auto switch Grommet Yes Relay, PLC 12 V 2-wire M9B Lead wire length symbols
Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Basic style, Foot style, Rod side flange style, Head side flange style, Single clevis style, Double clevis style, Mounting Symbol Specifications 0.5 -XA Change of rod
1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 32 Mounting Basic style, Foot style, Flange style Note) In the case of w/o air cushion, it comes with rubber bumper.