Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200
I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!
Vacuum pressure switch suction filter Voltage (Refer to Table 1.) 1 2 3 4 5 6 100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter F D31 D32 D51 Electrical entry D52 L plug connector, With 0.3 m lead wire With indicator
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 642.5 M4000.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 645 M1600.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) ?
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication32 to 131F (0 to 55C) (No freezing)90 or less (No condensation)?
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%