CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Note 1) Porting is M5 equivalent to #10-32UNF. S Rod end male thread "C" and "M" can be combined. Single acting spring extend Note 1) T Note 2) Note 1) Not available for with Double rod or Non-rotating rod.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

1.5 M20 x 1.5 1/4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

Guide Table Series MGF ø40, ø63, ø100 1

1 on page 8-23-7.

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

•

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KT10

) Operation Warning 1.