High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

MQQ

+ Stroke E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5

SMC Pneumatic Clean Series

Bore size Table(1) Standard stroke 6mm 8mm 10mm 6 Action Standard stroke (mm) 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 Bore size (mm) 6 8, 10 8 10 Double acting Table(2) Applicable auto switch (Refer to Best Pneumatics catalog for further information on auto switches.)

CQM

2 !7 !6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

VHK

(mm) 2(A) 2(A) Applicable tube O.D. (mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

VXF

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

Auto Drain Valve Longer life & Higher resistance to foreign matter

Normally open Normally closed Polycarbonate AD52 -A AD51 -A Nylon AD52 -6-A AD51 -6-A Metal AD52 -2-A AD51 -2-A 1 Enter the piping thread type to of the bowl assembly part number. Nil: Rc thread, N: NPT thread, F: G thread Please consult with SMC separately for psi and F unit display spccifications.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 @0 @1 Nickel plated Hexagon socket head plug Hard anodized Hexagon socket head plug Chrome molybdenum steel $1 Cylinder tube gasket Piston seal Scraper NBR NBR NBR NBR $2 $3 $4 $5 Hard anodized Electroless nickel plated Body (rodless cylinder) gasket 8-16-15 15 Series CY1F Dimensions QA Q + Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

VXD21/22/23

50A 50 2 0 17-3-33 2 The VX series will be revised shortly.

0.5

300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can

Series 10-, 21- AW-B Filter Regulator

tubing 6/4 Y C Q V BB W K H IN OUT IN OUT Z P2 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) Plate thickness 10-/21-AW30K-B: Max. 3.5 10-/21-AW40K-B: Max. 5 B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E CC A AW60K-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Leakage current Load Impendance x 2 pcs. x Power supply voltage Residual voltage x 2 pcs.

CXS

U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0 x 18.5 53 CXS20 2-M5 x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

2 !3 !4 !5 !6 !7 !